A composite dynamic-static coupling piezoelectric actuator and its driving method

Abstract

The invention discloses a composite dynamic-static coupling piezoelectric actuator and its driving method. The actuator includes a first diamond-shaped micro-displacement amplification mechanism, a second diamond-shaped micro-displacement amplification mechanism, and a third diamond-shaped micro-displacement amplification mechanism. And the driving foot, the first diamond-shaped micro-displacement amplification mechanism includes a first fixed frame, one end of the first fixed frame is fixed, and a first piezoelectric stack is arranged along the axial direction inside the first fixed frame, adjacent to the first fixed frame A second diamond-shaped micro-displacement amplifying mechanism and a third rhombus-shaped micro-displacement amplifying mechanism are respectively arranged on both sides, and the tops of the second rhombus-shaped micro-displacement amplifying mechanism and the third rhombus-shaped micro-displacement amplifying mechanism are connected together by driving feet, and the two A second piezoelectric stack and a third piezoelectric stack are respectively provided inside along the axial direction. The actuator of the invention has a simple and compact structure, can realize the drive of the motor under static DC voltage and dynamic AC voltage, realizes dynamic and static coupling excitation, and has the advantages of high positioning accuracy and wide application range.

Description

technical field [0001] The invention belongs to the technical field of piezoelectric actuators, and in particular relates to a composite dynamic-static coupling piezoelectric actuator based on a piezoelectric stack amplification mechanism and a driving method thereof. Background technique [0002] With the development of technology, precise positioning has become a key technology in related technical fields. For example, in the scientific and engineering applications of scanning probe microscope, micro-nano surgery, biomedicine and other fields, precise positioning technology plays a vital role. In these applications, the requirements for range of motion and resolution of the positioning system are typically on the order of millimeters and nanometers, respectively, requiring very good precision in the actuators. [0003] The factors affecting precise positioning in the actuator mainly include the control method of the actuator, mechanical structure, measurement technology an...

AI Technical Summary

Problems solved by technology

For this reason, it is usually necessary to use a displacement amplification mechanism to expand the output displacement of the piezoelectric actuator, but even with a displacement amplification mechanism, its overall range of motion is still limited

In addition, the increased output displacement is at the cost of reducing the output force, and there are still shortcomings in practicality

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