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Integrated cavity damping system

A vibration damping system and vibration isolation technology, which is applied in the direction of spring/shock absorber, vibration suppression adjustment, non-rotational vibration suppression, etc., can solve problems such as vibration and influence on the accuracy of experimental results, so as to improve detection accuracy and avoid direct Effect of contacting and reducing system vibration

Active Publication Date: 2020-03-06
TSINGHUA UNIV
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Problems solved by technology

[0003] However, some mechanisms in the ultra-high vacuum system, such as stepping motors, refrigerators, vacuum pumps, etc., will generate vibration during the working process, and the vibration will have a certain impact on some analysis and detection devices, thereby affecting the accuracy of the experimental results

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[0023] In order to make the object, technical solution and advantages of the present invention clearer, the present invention will be further described in detail below with reference to the accompanying drawings and examples. In order to make the object, technical solution and advantages of the present invention clearer, the present invention will be further described in detail below with reference to the accompanying drawings and examples. It should be noted that implementations not shown or described in the accompanying drawings are forms known to those of ordinary skill in the art.

[0024] Such as Figure 1-6 As shown, the comprehensive chamber vibration reduction system in the present invention mainly includes three parts, namely, an ultra-low vibration refrigeration unit, a vibration isolation chamber 8 and a sample chamber 9 . The ultra-low vibration refrigeration unit used to provide the required cooling capacity for sample cooling includes a sound insulation cover 1,...

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Abstract

The invention relates to an integrated cavity damping system. The integrated cavity damping system mainly comprises an ultra-low vibration refrigeration unit, a vibration isolation cavity and a samplecavity, the ultra-low vibration refrigeration unit comprises a sound insulation cover, a refrigerator, a refrigerator optical platform and a vacuum cover a, the vacuum cover a is arranged on the refrigerator optical platform, the refrigerator is arranged on a mounting plate, a low-frequency damper and a flexible bellow are arranged between the mounting plate and the bracket of the refrigerator, the bottom of the bracket of the refrigerator is connected with the refrigerator optical platform through a two-stage damping seat, the vibration isolation cavity is connected with the liquid conveyingpipe of the refrigerator through a vibration isolation liquid conveying pipe, the vibration isolation cavity is formed in the floating optical platform of the sample cavity through a three-dimensional damping mechanism, the liquid helium tank in the vibration isolation cavity communicates with an efficient heat exchanger through a low-temperature pipeline, the efficient heat exchanger is connected to a sample through a flexible cold chain, and the cooling medium is high-purity helium. The integrated cavity damping system can reduce the influence of vibration on the integrated cavity in a ultra-high vacuum system, and greatly improves the experimental detection accuracy.

Description

technical field [0001] The invention relates to the technical field of vacuum vibration reduction, in particular to a comprehensive cavity vibration reduction system. Background technique [0002] The ultra-high vacuum system is an important place for workpiece surface analysis and research. The ultra-high vacuum sample transfer system is to interconnect different ultra-high vacuum analysis and detection devices, so that the workpiece to be tested can be transferred to different analysis units in an ultra-high vacuum environment. In the detection device, different types of analysis and detection are carried out, with high transfer efficiency and high experiment efficiency. [0003] However, some mechanisms in the ultra-high vacuum system, such as stepping motors, refrigerators, vacuum pumps, etc., will generate vibration during the working process, and the vibration will have a certain impact on some analysis and detection devices, thereby affecting the accuracy of the exper...

Claims

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Application Information

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IPC IPC(8): F16F15/02F25B9/14
CPCF16F15/022F25B9/14
Inventor 刘大猛陈新春张晨辉庞华雒建斌
Owner TSINGHUA UNIV
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