Semiconductor laser and preparation method thereof
A semiconductor and laser technology, applied in semiconductor lasers, semiconductor laser devices, lasers, etc., can solve the problems of low saturated output power, low yield, and inability to achieve high power
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[0046]The core of the present invention is to provide a semiconductor laser. In the prior art, narrow linewidth semiconductor lasers usually include distributed feedback (DFB) lasers and ridge DBR lasers, although great progress has been made in increasing output power and reducing spectral linewidth. However, the preparation of the grating structure of the distributed feedback semiconductor laser (DFB) generally requires technologies such as secondary epitaxy or electron beam lithography, resulting in high chip manufacturing costs and low yields; ridge DBR lasers generally use ridges (width 2- 5 micron) waveguide structure suppresses high-order side modes and reduces the laser linewidth, which leads to low saturated output power and cannot achieve high-power narrow-linewidth lasers.
[0047] In the semiconductor laser provided by the present invention, a narrow strip waveguide is etched on the surface of the transmission layer facing away from the substrate, a first Bragg gra...
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