Light transmittance adjustment device and lighting system

Abstract

The invention discloses a light transmittance adjusting device and a lighting system. The light transmittance adjusting device comprises an adjusting body and a driving part connected with the adjusting body. The driving part is used for driving the adjusting body to move in the first direction or in the direction opposite to the first direction, wherein the adjusting body comprises a substrate and at least one light adjusting unit, the light adjusting unit comprises a plurality of grooves which are formed in the substrate and distributed at equal intervals, and the grooves extend in the firstdirection; an adjusted light spot falls in an area where the light adjusting unit is located; and in the first direction, the width of the groove is gradually increased or decreased. According to thetechnical scheme, the light transmittance adjusting device is simple in structure and low in cost, continuous light transmittance adjustment is achieved, and the high light transmittance adjusting resolution can be achieved through the adjusting body with the small space size.

Description

technical field [0001] Embodiments of the present invention relate to light transmittance adjustment technology, and in particular to a light transmittance adjustment device and an illumination system. Background technique [0002] The lighting system is an important part of the lithography machine equipment. In order to avoid the different powers of at least two mercury lamps in the lighting system from affecting the accuracy of the lithography machine, it is necessary to use a light transmittance adjustment device to adjust the light emitted by each mercury lamp. [0003] figure 1 It is a structural schematic diagram of the adjusting body in the light transmittance adjusting device in the prior art. Such as figure 1 As shown, the adjusting body includes a fan-shaped base plate 201 and a plurality of circular holes 202 with different diameters formed on the fan-shaped base plate 201 , and the fan-shaped base plate 201 can rotate around its fan-shaped center. for figure ...

AI Technical Summary

Problems solved by technology

figure 1 The light transmittance range of the adjustment body shown is limited, the upper limit is only about 50%. In addition, since the multiple circular holes 202 are separated from each other, continuous transmittance adjustment cannot be realized, and it cannot be realized in a small space size. Higher light transmittance adjusts resolution

In order to solve the above problems, an optical compensator is proposed in the prior art. The optical compensator can change the light transmittance by using the different light transmittance of the lens at different angles. However, due to the need to use two lenses, the optical compensation The space occupied by the device along the optical axis is large, the structure is complex, and the cost is high due to the difficulty of the mirror coating process

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