A Digital Twin Control Method for the Fluid Field of a SiC Coating Deposition Furnace
A technology of silicon carbide coating and control method, which is applied in coating, metal material coating process, gaseous chemical plating, etc. Practicality and market value, boosting production, addressing effects on deposition quality
Active Publication Date: 2022-05-24
WUXI RES INST OF APPLIED TECH TSINGHUA UNIV
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Problems solved by technology
[0003] At present, the deposition equipment used to deposit SiC coatings is more commonly used in deposition furnaces, but the existing deposition furnaces have the problem of poor fluid field distribution uniformity, which is critical to the preparation of coatings. This is due to the poor quality of domestic SiC coatings. One of the main reasons for qualifying
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[0016] The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only a part of the embodiments of the present invention, not all of the embodiments. The embodiments in this application and the features in the embodiments may be combined with each other without conflict. Based on the embodiments of the present invention, all other embodiments obtained by those of ordinary skill in the art without creative efforts shall fall within the protection scope of the present invention.
[0017] It should be noted that if there are directional indications (such as up, down, left, right, front, back, etc.) involved in the embodiments of the present invention, the directional indications are only used to explain a certain posture (as shown in the accompanying drawings). If the specific posture changes, th...
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The invention discloses a digital twin control method for the fluid field of a silicon carbide coating deposition furnace, which includes the following steps: (1) dividing the furnace space of the deposition furnace into a plurality of control areas, and installing a flow rate in each control area sensor; (2) collect the actual flow value of each control area detected by the flow sensor in each control area and send it to the digital twin device; (3) calculate the actual flow value of each control area and the theoretical flow value of each control area (4) Perform flow compensation according to the difference. The present invention utilizes the digital twin technology to build a digital twin model for the space in the deposition furnace in subregions. When production is achieved, the flow of substances affecting deposition in the deposition furnace is monitored in real time in subregions, and the error is obtained by fusing the collected actual flow with theoretical data. Based on the compensation results, regional flow compensation is carried out, which solves the problem of poor flow field distribution uniformity in the deposition furnace, and obtains high-quality silicon carbide coatings.
Description
technical field [0001] The invention relates to the field of silicon carbide coating preparation technology, in particular to a digital twin control method of the fluid field of a silicon carbide coating deposition furnace. Background technique [0002] The graphite crucible used for the growth of single crystal silicon has two shortcomings. One is that it will oxidize at 400 °C, and the other is that it will oxidize and lose powder after long-term use. Therefore, it is necessary to deposit a SiC coating on the graphite base. [0003] At present, the deposition equipment used to deposit SiC coatings is more commonly used in deposition furnaces. However, the existing deposition furnaces have the problem of poor distribution uniformity of the fluid field, which is very important for the preparation of coatings. One of the main reasons for qualifying. SUMMARY OF THE INVENTION [0004] The technical problem to be solved by the present invention is to provide a digital twin co...
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IPC IPC(8): C23C16/52C23C16/32
CPCC23C16/52C23C16/325
Inventor 彭雨晴信吉平
Owner WUXI RES INST OF APPLIED TECH TSINGHUA UNIV