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A kind of brazing method without splicing rotating target

A brazing method and technology of rotating target, applied in welding equipment, metal processing equipment, manufacturing tools, etc., to achieve the effect of easy heating rate, avoiding cracking, and controlling heating rate

Active Publication Date: 2022-07-26
FUJIAN ACETRON NEW MATERIALS CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0007] In order to solve the above-mentioned problems in the prior art, the present invention provides a brazing method for rotating targets without splicing, in which the target, back tube and brazing material are heated and brazed by using blast heating in an electrothermal constant temperature blast drying box. The welding process solves the problem of heating rate and heating uniformity. There is no temperature difference between the target, the back tube and the brazing material. The heating rate is controllable and the inner cavity size can be selected according to the specification of the target. The longest single joint can be bound. Rotating target within 3m

Method used

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  • A kind of brazing method without splicing rotating target
  • A kind of brazing method without splicing rotating target

Examples

Experimental program
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Effect test

Embodiment 1

[0036] Prepare a rotating ITO target with a specification of OD149-ID125*L850mm, of which the target tube specification is OD 1 149-ID 1 135*L1 800mm, back tube specification is OD 2 133-ID 2 125*L 2 850mm.

[0037] Step 1: Metallization of the inner surface of the target tube and the outer surface of the back tube: the brazing filler metal is oscillated into the surface of the target tube and the back tube at a high frequency by using an ultrasonic welding head to form a thin brazing filler metal layer. The metallization treatment process is not particularly limited, and a metallization treatment process well known to those skilled in the art can be used.

[0038] Step 2: Assemble the rotary target brazing device: install the back tube and the target on the positioning base, and then install the brazing material disk on the upper end of the target.

[0039] Step 3: Add brazing filler metal: use metal indium as the brazing filler metal, calculate the theoretical weight re...

Embodiment 2

[0043] Prepare a rotating niobium target with a specification of OD145-ID125*L1940mm, of which the target tube specification is OD 1 145-ID 1 134.5*L 1 1900mm, back tube specification is OD 2 133-ID 2 125*L 2 1940mm.

[0044] Step 1: Metallization of the inner surface of the target tube and the outer surface of the back tube: the brazing filler metal is oscillated into the surface of the target tube and the back tube at a high frequency by using an ultrasonic welding head to form a thin brazing filler metal layer. The metallization treatment process is not particularly limited, and a metallization treatment process well known to those skilled in the art can be used.

[0045] Step 2: Assemble the rotary target brazing device: install the back tube and the target on the positioning base, and then install the brazing material disk on the upper end of the target.

[0046] Step 3: Add brazing filler metal: use metal indium as the brazing filler metal, calculate the theoretica...

Embodiment 3

[0050] Prepare a rotating silicon target with a specification of OD146-ID125*L1194mm, of which the target tube specification is OD 1 146-ID 1 134.5*L 1 1150mm, back tube specification is OD 2 133-ID 2 125*L 2 1194mm.

[0051] Step 1: Metallization of the inner surface of the target tube and the outer surface of the back tube: the brazing filler metal is oscillated into the surface of the target tube and the back tube at a high frequency by using an ultrasonic welding head to form a thin brazing filler metal layer. The metallization treatment process is not particularly limited, and a metallization treatment process well known to those skilled in the art can be used.

[0052] Step 2: Assemble the rotary target brazing device: install the back tube and the target on the positioning base, and then install the brazing material disk on the upper end of the target.

[0053] Step 3: Add brazing filler metal: use metal indium as the brazing filler metal, calculate the theoretica...

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Abstract

The invention relates to a brazing method for non-splicing rotating target materials, which comprises the following steps: using an ultrasonic welding head to oscillate the brazing material into the inner surface of a target tube and the outer surface of a back tube; installing the target tube and the back tube on a positioning base Then connect the brazing material disk to the upper end of the target tube; place the assembled brazing device in the electric heating constant temperature blast drying oven, set the temperature control heating curve through the thermostat, after the holding time expires, the natural Cool to room temperature; after the whole device is cooled to room temperature, remove the residual brazing material on the brazing material disk with a scraper, and remove the brazing material disk and the positioning base to obtain the brazed rotating target material. The brazing method can solve the problem of large temperature difference in the heating process of the target tube and the back tube during the brazing process of the target material; the brazing method can easily control the heating rate, and can avoid the problem of cracking of the target material due to excessive heating.

Description

technical field [0001] The invention relates to the technical field of target material preparation, in particular to a brazing method for a non-splicing rotating target material. Background technique [0002] Rotating targets are key materials used in sputter coating processes. Since the rotating target needs to be installed on the coating machine, it is necessary to process a structure connected to the coating machine for installation. Since some materials are difficult to process complex structures, the target material needs to be brazed on a stainless steel back tube or a titanium back tube. The connection structure is machined on the back tube so that it can be installed normally. [0003] The prior art that has been disclosed so far is a method of heating and brazing a target and a back tube by using different heating methods; for example, the publication number is CN109352109A, and the patent name is a device and method for binding a rotating target, which A method f...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): B23K1/00
CPCB23K1/00
Inventor 林志河陈钦忠汪家兵叶开满张科
Owner FUJIAN ACETRON NEW MATERIALS CO LTD
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