Brazing method for joint-free rotary target

Abstract

The invention relates to a brazing method for a joint-free rotary target. The method particularly comprises the steps that brazing materials are subjected to high frequency oscillation to enter the inner surface of a target pipe and the outer surface of a back pipe through an ultrasonic welding head; the target pipe and the back pipe are mounted on a positioning base, and then a brazing filler metal disc is connected to the upper end of the target pipe; an assembled brazing device is placed in an electric heating constant-temperature blasting drying oven, a temperature control heating curve isset through a temperature controller, and after the heat preservation time is reached, the brazing device is naturally cooled to room temperature; and the whole set of device is cooled to room temperature, residual brazing materials on the brazing filler metal disc are removed through a scraper, the brazing filler metal disc and the positioning base are demounted, and the brazed rotary target isobtained. According to the brazing method, the problem that in the target brazing process, the temperature difference in the target pipe and back pipe heating process is large can be solved; and according to the brazing method, the heating rate can be controlled easily, and the problem of cracking due to too fast temperature rise of the target can be avoided.

Description

technical field [0001] The invention relates to the technical field of target material preparation, in particular to a brazing method for a rotating target without splicing. Background technique [0002] The rotating target is the key material used in the sputter coating process. Since the rotating target needs to be installed on the coating machine, it is necessary to process the structure connected with the coating machine for installation. Since some materials are difficult to process complex structures, the target material needs to be brazed on the stainless steel back tube or titanium back tube. The connection structure is processed on the back pipe so that it can be installed normally. [0003] The currently disclosed prior art is a method of heating and brazing the target and the back tube by using different heating methods; for example, the publication number is CN109352109A, and the patent name is a device and method for binding a rotating target. A method for tar...

AI Technical Summary

Problems solved by technology

[0007] In order to solve the above-mentioned problems in the prior art, the present invention provides a brazing method for rotating targets without splicing, in which the target, back tube and brazing material are heated and brazed by using blast heating in an electrothermal constant temperature blast drying box. The welding process solves the problem of heating rate and heating uniformity. There is no temperature difference between the target, the back tube and the brazing material. The heating rate is controllable and the inner cavity size can be selected according to the specification of the target. The longest single joint can be bound. Rotating target within 3m

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