Manufacturing process of built-in low-temperature pump nitrogen screen bent pipe
A manufacturing process and cryopump technology, which is applied to the manufacturing process of nitrogen shielded elbows of built-in cryopumps, can solve the problems of large occupied volume, high induced eddy current, distortion, etc., and achieves a small occupied space and low induced eddy current Effect
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[0012] The preferred embodiments of the present invention will be described in detail below in conjunction with the accompanying drawings, so that the advantages and features of the present invention can be more easily understood by those skilled in the art, so as to define the protection scope of the present invention more clearly.
[0013] see figure 1 , the manufacturing process of a built-in cryopump nitrogen screen elbow provided by the present invention comprises the following steps:
[0014] (1) Manufacture of bent pipe: Manufacture Φ80×1.65 spiral welded pipe 1, add welding Φ80×2 bent pipe process section 2 at both ends of spiral welded pipe 1, the material of spiral welded pipe 1 is Inconel625 alloy, and the bent pipe process section 2 The material is SS304 stainless steel;
[0015] The spiral welded pipe 1 made of Inconel625 material has the advantages of low electrical conductivity and high mechanical strength, so that the effect of small pump volume and low induce...
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