A kind of multifunctional flexible sensor and its preparation method and application

Abstract

The invention belongs to the field of electronic skin, and discloses a multifunctional flexible sensor and a preparation method and application thereof. The multifunctional flexible sensor comprises acapacitance layer. The capacitor layer comprises a bottom-layer flexible substrate, a bottom electrode, an intermediate dielectric layer, conductive electrodes, a top electrode and a top-layer flexible substrate from bottom to top, wherein the bottom electrode is a plate electrode; the intermediate dielectric layer is provided with a plurality of flexible protrusions which are fluctuant; each plate electrode on the top electrode is provided with a lead; tail ends of the leads on the two plate electrodes are oppositely arranged to form gaps; the conductive electrodes are arranged under the gaps; when the conductive electrodes are not embedded into the gaps, the two plate electrodes form a capacitor; and when the top-layer flexible substrate is subjected to external force, the top electrodemoves downwards, the conductive electrodes are embedded into the gaps, the two plate electrodes are conducted to form a resistor, and meanwhile, the top electrode and the bottom electrode form a capacitor. According to the invention, the measurement of temperature, distance and stress is realized, and the number of leads and the requirements of lead interfaces are reduced.

Description

technical field

[0001] The invention belongs to the field of electronic skin, and more specifically relates to a multifunctional flexible sensor and its preparation method and application. Background technique

[0002] With the discovery of new materials and the advancement of technology, the field of flexible electronics has made great progress. In order to obtain flexible pressure sensing devices, organic or inorganic electronic materials are integrated on flexible substrates and a certain microstructure is used. , the performance is not lower than or even exceeds that of traditional rigid sensor devices. As the largest organ of the human body, the skin has a huge and dense sensor network distributed in the skin tissue. For example, there are various receptors distributed in the hands of the human body, including pain receptors, temperature receptors and mechanical stimulation receptors, which can be used for static force , skin stretching, vibration, temperature, object ...

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