Double-layer vertical quartz tube carrier and processing method thereof
A quartz tube and vertical technology, applied in the field of quartz, can solve the problems that the processing gap of the double-layer tube assembly structure cannot meet the use requirements, the temperature measuring couple cannot be installed and used, and the couple tube is easy to deform, so as to improve the wafer utilization rate , space-saving, uniform deposition effect
Pending Publication Date: 2020-04-17
北京凯德石英股份有限公司
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Problems solved by technology
[0002] The existing quartz carrier welding parts and the processing gap of the double-layer tube assembly structure cannot meet the requirements of use. The overall design of the ventilation, air intake and exhaust pipes affects the temperature. At the same time, there are 5 couple tubes inside the original carrier structure tube, 3 of which are Ventilation, 2 pieces of temperature measurement, the wall thickness of the couple tube is 2mm, the wall is thin, and the wall thickness of the tube body is 6mm. A new type of double-layer vertical quartz tube carrier is specially designed for the needs of the work
Method used
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[0036] The following will clearly and completely describe the technical solutions in the embodiments of the present invention in conjunction with the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only a part of the embodiments of the present invention, rather than all the embodiments. The embodiments of the present invention and all other embodiments obtained by those of ordinary skill in the art without creative work shall fall within the protection scope of the present invention.
[0037] Such as figure 1 As shown, a double-layer vertical quartz tube carrier is characterized in that it includes an inner tube 1, an outer tube 2, a first quartz plate 3, a second quartz plate 4, a flange 5, a first couple tube 6, a second The coupling pipe 7, the third coupling pipe 8, the vent pipe 10, the first small flange 11, the second small flange 12, and the third small flange 13. The inner pipe 1 is embedded in the outer pipe 2,...
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The invention discloses a double-layer vertical quartz tube carrier and a processing method thereof. The quartz tube carrier comprises an inner tube, an outer tube, a first quartz plate, a second quartz plate, a flange, a first couple tube, a second couple tube, a third couple tube, a breather tube, a first small flange, a second small flange and a third small flange, wherein the inner tube is embedded in the outer tube; the inner tube and the outer tube are fixedly connected together in a welded mode; a gap distance between the inner tube and the outer tube is 15mm, the first couple pipe, thesecond couple pipe and the third couple pipe are fixedly welded on the inner wall of the inner pipe, the first small flange, the second small flange and the third small flange are fixedly welded withthe inner tube, the breather tube is fixedly welded with the inner tube, and a support sheet is fixedly welded below the breather tube.
Description
Technical field [0001] The invention relates to the technical field of quartz, in particular to a double-layer vertical quartz tube carrier and a processing method thereof. Background technique [0002] The existing quartz carrier welded parts and the processing gap of the double-layer tube assembly structure cannot meet the requirements of use. The design of ventilation, air intake and exhaust pipes affects the temperature as a whole. At the same time, there are 5 couple tubes inside the original carrier structure tube, of which 3 are Ventilation, two temperature measurement, the wall thickness of the couple tube is 2mm, the wall is thin, and the wall thickness of the tube body is 6mm. When they are welded to each other, the couple tube is easy to deform, which makes the thermocouple unable to be installed and used. A new type of double-layer vertical quartz tube carrier was specially designed for work needs. Summary of the invention [0003] The purpose of the present invention...
Claims
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Login to View More IPC IPC(8): B01J19/00B23P15/00
CPCB01J19/00B23P15/00
Inventor 张忠恕王连连赵鹤陈强于洋冯继瑶张娟边占宁孙云涛李宝军张连兴王建立
Owner 北京凯德石英股份有限公司