Thermally conductive and anti-corrosion composite film layer based on copper surface and preparation method
A composite film, anti-corrosion technology, applied in coating, superimposed layer plating, metal material coating process and other directions, can solve the problem of high preparation cost, harsh growth conditions of diamond film, unsuitable for thermal conductivity and anti-corrosion film and other problems, to achieve the effect of high thermal conductivity, less defects and good corrosion resistance
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Embodiment 1
[0037] The transition metal is the chromium layer.
[0038] A 25×20mm, 3mm-thick copper tube plate material sample and a Φ8 copper tube with a length of 10cm were selected, and a high-purity metal chromium target was selected as the sputtering target.
[0039] The specific operation steps are:
[0040] (1) Pretreatment of plate material samples and copper tubes: the processed block samples and copper tubes are polished with 400~1500# sandpaper in turn, and finally mechanically polished; mechanical polishing is done with a cloth wheel of 18~25m / s , using chromium oxide particle polishing paste; put the polished block sample and copper tube into industrial alcohol liquid for ultrasonic cleaning for 5 minutes, take it out and dry it with cold air at room temperature, and set it aside.
[0041] (2) Fix the pretreated block sample and copper tube on the substrate frame in the vacuum chamber of the magnetron sputtering device. The distance between the sample and the metal chromium ...
Embodiment 2
[0051] The transition metal is the titanium layer.
[0052] A 25×20mm, 3mm-thick copper tube plate material sample and a Φ8 copper tube with a length of 10cm were selected, and the sputtering target was made of high-purity titanium metal.
[0053] The specific operation steps are:
[0054] (1) Pretreatment of plate material samples and copper tubes: the processed block samples and copper tubes are polished with 400-1500# sandpaper in turn, and finally mechanically polished. Put the polished block sample and copper tube into industrial alcohol liquid and ultrasonically clean it for 5 minutes, take it out and dry it with cold air at room temperature, and set it aside.
[0055] (2) Fix the pretreated block sample and copper tube on the substrate frame in the vacuum chamber of the magnetron sputtering device. The distance between the sample and the metal titanium target is 70mm, and the copper tube on the substrate frame can rotate . Then close the vacuum chamber, and use a mec...
Embodiment 3
[0061] Reduce transition metal chromium layer thickness.
[0062] A 25×20mm, 3mm-thick copper tube plate material sample and a Φ8 copper tube with a length of 10cm were selected, and a high-purity metal chromium target was selected as the sputtering target.
[0063] The specific operation steps are:
[0064] (1) Pretreatment of plate material samples and copper tubes: the processed block samples and copper tubes are polished with 400~1500# sandpaper in turn, and finally mechanically polished. Put the polished block sample and copper tube into industrial alcohol liquid and ultrasonically clean it for 5 minutes, take it out and dry it with cold air at room temperature, and set it aside.
[0065] (2) Fix the pretreated block sample and copper tube on the substrate frame in the vacuum chamber of the magnetron sputtering device. The distance between the sample and the metal chromium target is 70 mm, and the copper tube on the substrate frame can rotate . Then close the vacuum ch...
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Abstract
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