A three-stage evaporation high-speed roll-to-roll vacuum lithium thin film production device
A production device and stage evaporation technology, which is applied in the field of three-stage evaporation high-speed roll-to-roll vacuum lithium thin film production equipment, can solve the problems of small heat capacity of the coating substrate, material vapor cannot be attached to the coating, and rapid temperature rise of the substrate substrate. Achieve the effects of improving high temperature phenomena, improving uneven deposition, and improving raw material utilization
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Embodiment 1
[0049] like figure 1 shown,
[0050] A three-stage evaporation high-speed roll-to-roll vacuum lithium thin film production device includes a frame, the frame is made of stainless steel, and the frame is provided with a first separator and a second separator, the first separator and the second separator The partitions are arranged longitudinally, the first partition and the second partition are provided with a window corresponding to the position, the window is rectangular, parallel to the axis of the cooling roll, and its length is slightly larger than the width of the base film, The length of the passing window is selected to be greater than the width of the base film by 6m, and the first and second partitions separate the inside of the frame into an unwinding cavity, a first coating cavity, a rewinding cavity, and the base film. Pass through the unwinding cavity to the rewinding cavity through the window;
[0051] The first coating chamber is provided with a three-stage ev...
Embodiment 2
[0069] A three-stage evaporation high-speed roll-to-roll vacuum lithium thin film production device includes a frame, the frame is made of stainless steel, and the frame is provided with a first separator and a second separator, the first separator and the second separator The partitions are arranged longitudinally, the first partition and the second partition are provided with a window corresponding to the position, the window is rectangular, parallel to the axis of the cooling roll, and its length is slightly larger than the width of the base film, The length of the passing window is selected to be greater than the width of the base film by 6m, and the first and second partitions separate the inside of the frame into an unwinding cavity, a first coating cavity, a rewinding cavity, and the base film. Pass through the unwinding cavity to the rewinding cavity through the window;
[0070] The first coating chamber is provided with a three-stage evaporation mechanism, and the thr...
Embodiment 3
[0089] A three-stage evaporation high-speed roll-to-roll vacuum lithium thin film production device includes a frame, the frame is made of stainless steel, and the frame is provided with a first separator and a second separator, the first separator and the second separator The partitions are arranged longitudinally, the first partition and the second partition are provided with a window corresponding to the position, the window is rectangular, parallel to the axis of the cooling roll, and its length is slightly larger than the width of the base film, The length of the passing window is selected to be greater than the width of the base film by 6m, and the first and second partitions separate the inside of the frame into an unwinding cavity, a first coating cavity, a rewinding cavity, and the base film. Pass through the unwinding cavity to the rewinding cavity through the window;
[0090] The first coating chamber is provided with a three-stage evaporation mechanism, and the thr...
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