MEMS micromirror scanning light path system
A technology of optical path system and micromirror, which is applied in the field of scanning micromirror, can solve the problems of small picture, small scanning angle of MEMS imaging, and large space occupied by projection, and achieve the effect of small power, large scanning angle, and no need for heat dissipation
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[0015] In order to further illustrate the technical means and effects adopted by the present invention to achieve the predetermined purpose, the specific embodiments, structural features and effects of the present invention will be described in detail below with reference to the accompanying drawings and examples.
[0016] A MEMS micro-mirror scanning optical path system includes: a laser 1, a compensation lens 3, an aperture 4, a MEMS micro-mirror 5, a beam expander lens 6 and an imaging screen 7; the light generated by the laser 1 passes through the compensation lens 3, the light The aperture 4, the MEMS micromirror 5 and the beam expander lens 6 are displayed on the imaging screen.
[0017] The laser 1 and the compensation lens 3 can communicate with the optical path through the incident mirror 2.
[0018] The aperture of the aperture 4 is matched with the size of the scanning lens of the MEMS micromirror 5 to avoid diffraction fringes on the comb-tooth microstructure on the edge ...
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