Internal drive and external detection type planar coil decoupling micro gyroscope

Abstract

The invention discloses an internal drive and external detection type planar coil decoupling micro gyroscope comprising a lower substrate, a bonding frame body arranged on the lower substrate, and anupper supporting frame arranged on the bonding frame body. The two opposite ends of the inner side of the upper supporting frame are provided with detection mass blocks. The two sides of each detection mass block are connected with the upper supporting frame through a detection combination beam; a driving mass block is arranged between the two detection mass blocks and is located in the center ofthe upper supporting frame; and the driving mass block is connected with the detection mass blocks through driving combination beams. The internal drive and external detection type planar coil decoupling micro gyroscope disclosed by the invention is symmetrical in overall structure; the external mass block is driven to detect by adopting internal driving to realize an orthogonal decoupling effect;the weak offset force can be detected by utilizing a dynamic electromotive force effect of the planar coil, the displacement sensitivity is high; the structure is reasonable and compact and the anti-electromagnetic interference capability is low; and noises are low and the stable amplitude driving is realized.

Description

technical field [0001] The invention relates to an internally driven and externally detected planar coil decoupling micro-gyroscope, which belongs to the related field of micro-inertial navigation technology. Background technique [0002] Gyroscope is an inertial device that can be sensitive to the angle or angular velocity of the carrier, and it plays a very important role in the fields of attitude control, navigation and positioning. For micro-gyroscopes, quadrature error is an important factor affecting its performance. In an ideal situation, when there is no angular velocity input, the pure driving movement will not be coupled to the detection direction. Similarly, the pure detection movement will not cause the movement of the driving direction. However, due to the inevitable existence of processing errors, in the absence of decoupling In the case of , the driving motion and the detection motion will affect each other. Even if there is no angular velocity input, the det...

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Problems solved by technology

In an ideal situation, when there is no angular velocity input, the pure driving motion will not be coupled to the detection direction, similarly, the pure detection motion will not cause the motion in the driving direction, but due to the inevitable existence of processing errors, in the absence of decoupling In the case of , the driving motion and the detection motion will affect each other. Even if there is no angular velocity input, the detection direction will have a displacement. This is the main reason for the quadrature error. When there is an angular velocity input, the detection motion is also It will drive the driving mechanism to move, which will lead to the instability of the driving movement

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