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A kind of zirconium graphene getter material and preparation method thereof

A technology of getter materials and zirconium graphite, which is applied in the field of zirconium graphene getter materials and its preparation, can solve the problems of lack of types, no major breakthrough in performance, difficulty in meeting the needs of efficient production of electronic components, etc., and achieve excellent Inspiratory performance, effect of good inspiratory capacity

Active Publication Date: 2021-09-21
NANJING HUADONG ELECTRONICS VACUUM MATERIAL
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

At present, the main getter alloy materials include titanium-molybdenum, zirconium-aluminum, zirconium-vanadium iron, etc. Most of these materials are alloys made of titanium or zirconium and some other metals or non-metals. There are relatively few types and no major breakthroughs in performance. , has gradually been difficult to meet the needs of efficient production of modern electronic components

Method used

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Examples

Experimental program
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Effect test

preparation example Construction

[0016] The preparation method of this material specifically includes the following contents:

[0017] 1) Mix zirconium powder and graphene powder, wherein the mass percentage of zirconium powder is 40-90%, and the balance is graphene; mix the mixed powder on a mixer for more than 3 hours to make a uniform zirconium graphene mixed powder;

[0018] 2) Use process 1) The zirconium powder and graphene are uniformly mixed powder, and the mixed powder is ball milled for more than 10 hours to make it mechanically alloyed to make zirconium graphene getter powder;

[0019] 3) Use the powder made by process 1) or process 2), put the powder into a pressing mold, use a press or isostatic pressing equipment, use a pressure of more than 1 ton / square centimeter, press and form, and make a suction agent or vacuum electronic components;

[0020] 4) Use the powder made by process 1) or process 2), mix the powder evenly with colloids such as epoxy resin, and store in airtight; when using, pour ...

Embodiment 1

[0025] Use 70g of electric vacuum zirconium powder, the purity is greater than 97%, and the particle size is less than 325 mesh; 30g of multi-layer graphene powder, the purity is greater than 95%, and the sheet diameter is 5-50 microns.

[0026] Mix the two powders and mix them on a mixer for 3 hours; take 1000 mg of the mixed powder and put it into a pressing mold. The inner size of the mold is a disc shape with a diameter of 10mm and a height of 2mm. Use 1 ton of pressure to press the powder into a tablet Shaped blank; put the blank into a vacuum sintering furnace, adopt a high temperature of 950 degrees, and sinter for 1 hour under a vacuum condition above 0.001Pa, and get the getter ZCn10P820X after cooling.

[0027] How to use: Put the getter ZCn10P820X into the glass bulb of the vacuum device, and use a high-frequency machine to activate the getter to 800 degrees for 10 minutes under the vacuum condition above 0.01Pa. The getter can enter the working state after cooling ...

Embodiment 2

[0029] Use 45g of electric vacuum zirconium powder, the purity is greater than 97%, and the particle size is less than 325 mesh; 5g of few-layer graphene powder, the purity is greater than 97%, and the sheet diameter is 10-20 microns.

[0030] Mix the two powders and mix them on a ball mill for 72 hours to make them mechanically alloyed; take 2g of zirconium-graphene alloy powder, mix and stir with 18g of epoxy resin glue to make air-absorbing glue, and seal the package; use this colloid to stick Connect the vacuum device, after bonding, heat the bonding place at 200 degrees under vacuum conditions for more than 1 hour to accelerate the solidification of the colloid and activate the getter material; after cooling to room temperature, the getter material can enter the working state.

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Abstract

The invention relates to a zirconium graphene getter material and a preparation method thereof. The mass percentage of the alloy composition is 40% to 90% of zirconium and 10% to 60% of graphene. Zirconium adopts zirconium powder or zirconium hydrogenated powder, and graphene adopts Single-layer, few-layer or multi-layer graphene; powders of two materials are formed into zirconium graphene getter materials through mechanical alloying or powder metallurgy vacuum sintering. Advantages: 1) It is used as a getter material to expand the category of new getter materials. It has a large microscopic getter surface area and complex internal microstructure, and has excellent getter performance; 2) It can be used to make vacuum electronic components and parts, It has better ability to absorb residual gas.

Description

technical field [0001] The invention relates to a zirconium graphene getter material and a preparation method thereof, belonging to the technical field of electronic component materials. Background technique [0002] Vacuum electronic components are widely used in the field of electronic information, such as traveling wave tubes, X-ray tubes, infrared chips, etc. The interior of vacuum electronic components is generally a vacuum structure, and the vacuum degree inside the device has an important impact on the life and precision of the device. In order to eliminate impurity gas in the device and ensure a good vacuum degree of the device, it is usually necessary to install a getter material in the device, and there are also parts such as cathodes and sealants made of vacuum electronic components using getter materials, which also play the role of getter . At present, the main getter alloy materials include titanium-molybdenum, zirconium-aluminum, zirconium-vanadium iron, etc...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): C22C16/00C22C32/00C22C1/05
CPCC22C1/05C22C16/00C22C32/0084C22C2202/04
Inventor 王浏杰薛函迎柴云川郭卫斌
Owner NANJING HUADONG ELECTRONICS VACUUM MATERIAL
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