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Magnet base, Hall ion source and magnet thermal protection device

A Hall ion source and magnet technology, applied in the field of ion sources, can solve the problems of high temperature and loss of magnetism of magnets, achieve the effect of reducing the influence of magnets, preventing magnetic attenuation, and improving stability

Pending Publication Date: 2020-05-08
ZHONGSHAN IBD TECH CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0005] The purpose of this application is to solve one of the above-mentioned technical defects, especially the problem that a large amount of heat is conducted to the magnet, which easily leads to the high temperature of the magnet and the loss of magnetism

Method used

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  • Magnet base, Hall ion source and magnet thermal protection device
  • Magnet base, Hall ion source and magnet thermal protection device
  • Magnet base, Hall ion source and magnet thermal protection device

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Embodiment Construction

[0041] Embodiments of the present application are described in detail below, examples of which are shown in the drawings, wherein the same or similar reference numerals denote the same or similar elements or elements having the same or similar functions throughout. The embodiments described below by referring to the figures are exemplary only for explaining the present application, and are not construed as limiting the present application.

[0042] Those skilled in the art will understand that unless otherwise stated, the singular forms "a", "an", "said" and "the" used herein may also include plural forms. It should be further understood that the wording "comprising" used in the description of the present application refers to the existence of the stated features, integers, steps, and operations, but does not exclude the existence or addition of one or more other features, integers, steps, and operations.

[0043] Those skilled in the art can understand that, unless otherwise ...

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Abstract

The invention relates to a magnet base. The magnet base comprises a water-cooling outer cover, wherein an upper sealing ring and a lower sealing ring are respectively arranged at two ends of the water-cooling outer cover; the upper sealing ring is connected to an upper cover plate of a Hall ion source, and the lower sealing ring is connected with a bottom plate of the Hall ion source. The interiorof the water-cooling outer cover is designed to be hollow, and a magnet is installed in the space in the water-cooling outer cover. The water-cooling outer cover is wrapped by a water path arranged around the space for mounting the magnet; the water-cooling outer cover is also provided with a water inlet and a water outlet of the water path; and the water-cooling outer cover is used for isolatingexternal heat radiation from being transmitted to the internal magnet and carrying out water-cooling heat dissipation on the magnet through the water path. According to the scheme, the influence of external environment heat radiation on the magnet is reduced, and the risk of magnetic attenuation of the magnet caused by heat radiation is prevented. In addition, the invention also provides the Hallion source and a magnet thermal protection device, so the cooling structure of the anode is simpler, and the maintenance is more convenient.

Description

technical field [0001] The present application relates to the technical field of ion sources, and in particular, the present application relates to a magnet base, a Hall ion source and a magnet thermal protection device. Background technique [0002] Ion source is an applied science and technology with wide application, many types, many sciences involved, strong technological process and very rapid development. As a very common, simple and durable ion source type, the Hall ion source is mostly used in the field of thin film deposition as a deposition auxiliary component to improve the physical properties of thin films. [0003] refer to figure 1 As shown, the basic principle of the traditional Hall ion source is: a Hall effect magnetic field is generated by a permanent magnet, and the anode plasmaizes the process gas under the cooperation of a strong axial magnetic field, and the plasmaized gas is accelerated by the anode, and the The gas ions separate and form an ion beam...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H01J27/14H01J27/02
CPCH01J27/022H01J27/146
Inventor 刘伟基冀鸣赵刚易洪波曾文华刘运鸿吴秋生
Owner ZHONGSHAN IBD TECH CO LTD