Multi-block pixel array based on multi-wafer stacking technology
A pixel array and block technology, applied in electrical components, image communication, color TV components, etc., can solve problems such as reducing pixel size, and achieve the effect of improving frame rate, ensuring authenticity, and accelerating transmission speed.
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[0024] The composite dielectric gate pixel array and the peripheral circuit module of this embodiment are fabricated on two different wafers, which are upper and lower, and are connected through inter-wafer through holes. Composite dielectric grid dual-device photosensitive detectors are periodically arranged on the upper wafer and interconnected with a NOR-type architecture to form a composite dielectric grid dual-device pixel array, where a single pixel is a composite dielectric grid dual-transistor photosensitive detector , Its structure diagram such as figure 1 As shown, it includes a photosensitive transistor and a reading transistor. The photosensitive transistor and the reading transistor are formed on the same P-type semiconductor substrate, and both adopt a composite dielectric gate structure. The structure is specifically bottom-insulated from bottom to top. The dielectric layer, the charge coupling layer, the top insulating dielectric layer and the control gate; the r...
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