Two-dimensional micro-displacement sensor based on four-quadrant grating and detector

A four-quadrant detector, two-dimensional micro-displacement technology, applied in instruments, measuring devices, optical devices, etc., can solve the problems of difficult installation, inability to improve accuracy, and low reliability, and achieve increased range and improved resolution. rate and accuracy, eliminating the effects of low sensitivity

Active Publication Date: 2020-05-15
ZHONGBEI UNIV
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0004] Aiming at the technical problems of the above-mentioned traditional geometric moiré fringe technology, such as difficult installation, low reliability, and unimprovable precision, the present invention provides a high-sensitivity, high-linearity, and strong anti-electromagnetic interference capability based on four-quadrant gratings and detectors. Two-dimensional micro-displacement sensor

Method used

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  • Two-dimensional micro-displacement sensor based on four-quadrant grating and detector
  • Two-dimensional micro-displacement sensor based on four-quadrant grating and detector
  • Two-dimensional micro-displacement sensor based on four-quadrant grating and detector

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Embodiment

[0033] The embodiment parameters of the two-dimensional micro-displacement sensor based on four-quadrant grating and detector are as follows:

[0034] Laser wavelength: λ=635nm;

[0035] Movable grating period: d=800nm;

[0036] Four-quadrant grating period: d=800nm.

[0037] The specific analysis is as follows:

[0038] The intensity of light passing through the first quadrant is:

[0039]

[0040] The intensity of light passing through the second quadrant is:

[0041]

[0042] The intensity of light passing through the third quadrant is:

[0043]

[0044] The intensity of light passing through the fourth quadrant is:

[0045]

[0046] The light intensity difference through the first quadrant grating and the third quadrant grating is:

[0047]

[0048] The light intensity difference passing through the second quadrant grating and the fourth quadrant grating is:

[0049]

[0050] From the above derivation, it can be seen that the DC offset of the light...

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Abstract

The invention belongs to the technical field of micro-displacement sensors, in particular to a two-dimensional micro-displacement sensor based on a four-quadrant grating and a detector. The sensor comprises a first laser, a second laser, a first collimating lens, a second collimating lens, a movable grating, a four-quadrant grating and a four-quadrant detector. The first laser and the second laserare respectively arranged right above the first collimating lens and the second collimating lens. A movable grating is arranged below the first collimating lens and the second collimating lens. An X-axis four-quadrant grating and a Y-axis four-quadrant grating are arranged below the movable grating, and a first four-quadrant detector and a second four-quadrant detector are arranged below the X-axis four-quadrant grating and the Y-axis four-quadrant grating respectively. Four paths of signals are generated through the four-quadrant grating and the detector for difference, subsequent high-powersubdivision is facilitated, background noise and direct-current components can be eliminated, and the resolution and precision of micro-displacement detection are improved. The micro-displacement sensor is used for measuring micro-displacement.

Description

technical field [0001] The invention belongs to the technical field of micro-displacement sensors, in particular to a two-dimensional micro-displacement sensor based on a four-quadrant grating and a detector. Background technique [0002] Displacement is the most basic physical quantity. Among them, high-precision displacement measurement technology is the basis of precision machining and has a wide range of applications. The measurement accuracy of the displacement measurement sensor determines the manufacturing accuracy of the entire manufacturing industry, and the manufacturing industry is the foundation of the entire industry, which restricts the development of various fields. With the continuous development of precision manufacturing technology, the improvement of the precision of processed objects requires displacement measuring instruments to have the characteristics of high precision, high resolution, high reliability, large range, small volume and low cost. [0003...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01B11/02
CPCG01B11/02
Inventor 张瑞李孟委靳黎明金丽
Owner ZHONGBEI UNIV
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