A thermocouple positioning device for thermal process equipment and its accuracy verification method
A technology of positioning device and calibration method, which is applied to thermometers and measuring devices using electrical devices, electrical/magnetic components directly sensitive to heat, etc. And other issues
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[0032] The present invention will be further described in connection with the examples, but the embodiments of the present invention are not limited thereto.
[0033] like figure 1 , The positioning device thermocouple heat process apparatus for mounting a thermocouple, comprising a chassis 1, the chassis 1 is mounted on the thermal processing apparatus, provided with at least two internal thermal process equipment communication hole test chassis 1 a plurality of test wells and the corresponding different heights puck 2, positioned on the disc 211 is provided with at least two stop holes 21, the positioning plate 2 is connected detachably to the chassis 1;; a thermocouple 11 includes a test and verification electrical galvanic 3 even 4, test 3 and even parity, respectively, passes through the galvanic limiting hole 4 is positioned within the test disc 2 is inserted into the hole 11 of the chassis 21 and a thermal process equipment.
[0034] In some embodiments, the chassis 1 is po...
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