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Large-bandwidth high-efficiency grating coupler

A grating coupler and high-efficiency technology, applied in the field of optoelectronics, can solve the problems of low coupling efficiency and small bandwidth, and achieve the effect of improving coupling efficiency and reducing loss

Inactive Publication Date: 2020-05-19
UNIV OF ELECTRONICS SCI & TECH OF CHINA
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0005] The object of the present invention is to propose a grating coupler with high coupling efficiency and large bandwidth for the defects of low coupling efficiency and small bandwidth of the traditional grating coupler

Method used

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Embodiment

[0027] In this embodiment, the grating is made of Si material, with a height of 220nm, an etching depth of 80% (176nm), 20 arc-shaped grooves and 20 arc-shaped ridges, which are concentric circles with different radii, and the radius of the concentric circles is 36. ~49.2μm, arc range [-17.46, 17.46], the widths of 20 grooves and 20 ridges are as follows (the following data units are μm): 0.1 0.62; 0.10.54; 0.1 0.63; 0.1 0.47; 0.1 0.59; 0.1 0.55; 0.1 0.54; 0.1 0.56; 0.10 0.53; 0.12 0.54; 0.15 0.52; The tapered waveguide is made of Si material with a height of 220nm and a fan shape. The radius of the concentric circle at the edge of the fan is 36μm. The rightmost end of the fan is a rectangular light exit with a width of 500nm and a height of 220nm.

[0028] SiO 2 layer with a length of 100 μm, a width of 80 μm, and a thickness of 2 μm.

[0029]The Bragg reflector has a length of 100 μm and a width of 80 μm, and the distance between the upper interface of the reflection layer...

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Abstract

The invention discloses a large-bandwidth high-efficiency grating coupler, and belongs to the technical field of photoelectrons, wherein the waveguide layer, the SiO2 layer and the substrate are sequentially arranged from top to bottom, and a Bragg reflector structure is arranged in the SiO2 layer; wherein the waveguide layer comprises an optical grating and a conical waveguide; wherein the grating is obtained by alternately arranging a plurality of arc-shaped grooves and arc-shaped convex ridges, the width of each arc-shaped groove is 0.1-0.35 mu m, the depth of each arc-shaped groove is 176nm, the width of each arc-shaped convex ridge is 0.35-0.6 mu m, the height of each arc-shaped convex ridge is 220-270 nm, and the arc-shaped grooves and the arc-shaped convex ridges are of concentricarc structures. According to the grating coupler provided by the invention, the loss caused by mode field mismatch can be effectively reduced, the 3dB bandwidth of the coupler is increased to 86 nm from 30-40 nm, and the highest coupling efficiency is improved to 61%.

Description

technical field [0001] The invention belongs to the field of optoelectronic technology, in particular to a grating coupler based on an SOI structure used between a waveguide (such as an optical fiber) and an integrated photonic circuit. Background technique [0002] As an important basic component of integrated optics, optical waveguides can limit the size of the optical wave mode field to wavelength or sub-wavelength transmission. Through the interaction between the loop structure and physical quantities, optical coupling, shunting, filtering, switching, Basic functions such as modulation, amplification, wavelength conversion and wavelength division multiplexing. Due to the small size of optical waveguides, high functional integration, strong anti-environmental interference, and suitability for mass production, various passive optical devices manufactured using optical waveguide technology have been widely used in integrated photonic circuits in the past decade. Since opti...

Claims

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Application Information

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IPC IPC(8): G02B6/124G02B6/42
CPCG02B6/124G02B6/4204
Inventor 苏君鄢禄文
Owner UNIV OF ELECTRONICS SCI & TECH OF CHINA
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