Vertical external cavity surface emitting laser

A technology for emitting lasers and lasers, used in lasers, laser parts, semiconductor lasers, etc., can solve the problems of small tuning range, short tuning range of resonant external cavity, limited wavelength tuning range, etc., to expand the cavity length and improve the fineness. , the effect of narrow spectral line width

Pending Publication Date: 2020-06-02
长春中科长光时空光电技术有限公司
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  • Abstract
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  • Claims
  • Application Information

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Problems solved by technology

At present, the principle of cavity length tuning is widely used to tune the vertical external cavity surface emitting laser. The tuning of the wavelength is by adjusting the distance between the external cavity mirror and the chip. The tuning range is small, and its tuning range is smaller than the gain spectrum range of the emitting chip. The wavelength tuning range is the actual cavity length tuning range of the external cavity mirror and the chip. Due to the limitation of the cavity length tuning range, the wavelength tuning range is limited; at the same time, because the resonant external cavity tuning range is very short, the spectral linewidth is still wide

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Embodiment Construction

[0031] In order to enable those skilled in the art to better understand the solution of the present application, the present application will be further described in detail below in conjunction with the drawings and specific implementation methods. Apparently, the described embodiments are only some of the embodiments of this application, not all of them. Based on the embodiments in this application, all other embodiments obtained by persons of ordinary skill in the art without making creative efforts belong to the scope of protection of this application.

[0032] In the following description, a lot of specific details are set forth in order to fully understand the present invention, but the present invention can also be implemented in other ways different from those described here, and those skilled in the art can do it without departing from the meaning of the present invention. By analogy, the present invention is therefore not limited to the specific examples disclosed bel...

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Abstract

The invention discloses a vertical external cavity surface emitting laser. The vertical external cavity surface emitting laser comprises a collimating lens; a laser emitting chip which is located at the first side of the collimating lens, the laser emitting chip comprises a first electrode provided with a first light outlet, a first contact layer, an active layer, a second contact layer and a second electrode provided with a second light outlet sequentially stacked from bottom to top, and the first light outlet being located on the focal plane of the first side of the collimating lens; a diffraction grating which is positioned at the second side of the collimating lens, and the first side being opposite to the second side; and a first top cavity mirror which is positioned on one side, faraway from the collimating lens, of the laser emitting chip, or a second top cavity mirror which is positioned in the laser emitting chip. The diffraction grating has a very wide tuning range and can provide flat first-order diffraction efficiency, so that the gain spectrum range of the active layer of the laser emitting chip is fully covered, the wavelength tuning range is the gain spectrum range,the wavelength tuning range is widened, and the vertical outer resonant cavity enables the cavity length of the gain resonant cavity to be increased and the spectral line width to be narrowed.

Description

technical field [0001] The present application relates to the technical field of semiconductor lasers, in particular to a vertical external cavity surface emitting laser. Background technique [0002] Vertical-External-Cavity Surface-Emitting Laser (VECSEL) is a small semiconductor laser that emits laser light perpendicular to the surface of the semiconductor wafer. During the use of vertical external cavity surface emitting lasers, it is usually necessary to quickly tune the wavelength. At present, the principle of cavity length tuning is widely used to tune the vertical external cavity surface emitting laser. The tuning of the wavelength is by adjusting the distance between the external cavity mirror and the chip. The tuning range is small, and its tuning range is smaller than the gain spectrum range of the emitting chip. The wavelength tuning range is the actual cavity length tuning range of the external cavity mirror and the chip. Due to the limitation of the cavity len...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H01S5/183
CPCH01S5/18302H01S5/18366H01S5/18369
Inventor 张星
Owner 长春中科长光时空光电技术有限公司
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