Tunable terahertz waveguide filter based on bimorph thermal actuator
A waveguide filter and actuator technology, applied in the field of tunable terahertz waveguide filters, can solve the problems of unfavorable IC process integration, unsuitable for small receivers, large filter insertion loss, etc., and achieve good application prospects and tuning range. Wide, high frequency effect
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[0034] The present invention will be further described below in conjunction with the drawings and specific embodiments:
[0035] Such as figure 1 , Picture 12 with Figure 13 As shown, an adjustable terahertz waveguide filter based on a double-layer bending thermal actuator of the present invention includes an E-plane longitudinal diaphragm 1, a double-layer bending thermal actuator 2 and a rectangular waveguide 3. The rectangular waveguide 3 includes a lower cavity The body 301 and the upper cavity 302, the lower cavity 301 and the upper cavity 302 are assembled together by vacuum lead welding. There is an inner for installing the E-side longitudinal diaphragm 1 and the double-layer bending thermal actuator 2 between them. Cavity, the end face of the inner cavity is a rectangle with a size of a×b, the side length in the vertical direction is a, and the length in the horizontal direction is b, and b Picture 12 It is a schematic diagram of the tunable terahertz waveguide filter of...
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