Ozone generation and purification system

An ozone generating device and ozone technology are applied in ozone preparation, discharge method preparation of ozone, oxygen/ozone/oxide/hydroxide and other directions, which can solve the problems of inability to collect ozone and impurity of ozone, and achieve the prevention of gas circuit pressure. The effect of increased and high safety factor

Pending Publication Date: 2020-06-09
SHANGHAI INST OF MICROSYSTEM & INFORMATION TECH CHINESE ACAD OF SCI
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0004] What this application aims to solve is the technical problem that the ozone produced by the ozone generation and purification system in the prior art is impure and cannot be collected

Method used

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  • Ozone generation and purification system

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Embodiment Construction

[0034] The technical solutions in the embodiments of the present application will be clearly and completely described below in conjunction with the drawings in the embodiments of the present application. Apparently, the described embodiments are only some of the embodiments of this application, not all of them. Based on the embodiments in this application, all other embodiments obtained by persons of ordinary skill in the art without creative efforts fall within the protection scope of this application.

[0035] Reference herein to "one embodiment" or "an embodiment" refers to a specific feature, structure or characteristic that may be included in at least one implementation of the present application. In the description of the embodiments of the present application, it should be understood that the orientations or positional relationships indicated by the terms "upper", "lower", "top", and "bottom" are based on the orientations or positional relationships shown in the drawing...

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Abstract

The invention provides an ozone generation and purification system. The ozone generation and purification system comprises an oxygen supply device, an ozone generation device, an ozone separation device, a control device and a gas path pipeline; the oxygen supply device can provide oxygen; the ozone generation device can electrolyze oxygen into mixed gas containing oxygen and ozone; the ozone separation device can separate ozone in the mixed gas, and an ozone adsorption device is arranged in the ozone separation device; the oxygen supply device, the ozone generation device and the ozone separation device are sequentially communicated through a gas path pipeline, and the gas path pipeline comprises a plurality of branch pipelines; the control device can control the branch pipelines to be opened or closed, and the control device can regulate and control the air pressure of the plurality of branch pipelines. The ozone adsorption device is arranged in the ozone separation device of the ozone generation and purification system, ozone can be collected, the control device can control the plurality of branch pipelines to be opened or closed, the air pressure of the plurality of branch pipelines is regulated and controlled, increase of the air path pressure is effectively prevented, and the safety coefficient is high.

Description

technical field [0001] The present application relates to the technical field of ozone preparation, in particular to an ozone generation and purification system. Background technique [0002] Molecular beam epitaxy technology is a very advanced scientific research technology for growing thin films. Oxide molecular beam epitaxy technology needs to use ozone to provide oxygen elements for thin films. Since ozone is easy to decompose and difficult to transport, it needs to be produced and used now. [0003] At present, most of the ozone generator products used in the industry use air as the oxygen source for direct electrolysis. Since there is a large amount of nitrogen in the air, the ozone produced by this method is impure and mixed with nitrogen compounds, so it cannot be used for oxidation that requires high vacuum and high purity. thin film growth. Moreover, due to the lack of an ozone collection process, the purpose of preparing and reusing within a period of time canno...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C01B13/11B01D53/00B01D49/00
CPCC01B13/11B01D53/002B01D49/00C01B2201/90B01D2257/106B01D2256/12
Inventor 陈文清沈大伟刘正太江志诚刘万领黄喆卢祥乐
Owner SHANGHAI INST OF MICROSYSTEM & INFORMATION TECH CHINESE ACAD OF SCI
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