Laser ultrasonic detection device and method based on synthetic aperture focusing imaging
A technology of synthetic aperture focusing and laser ultrasound, which is applied in the direction of measuring devices, optical devices, instruments, etc.
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[0040] Based on the device of embodiment 1, a laser ultrasonic detection method based on synthetic aperture focusing imaging is proposed, comprising the following steps:
[0041] Step 100, first calibrate the coordinates of the three-dimensional vibrating mirror, the interferometer probe and the three-dimensional translation platform, and obtain the conversion relationship of the three coordinate systems;
[0042] Step 200, controlling the three-dimensional translation platform to scan the sample one-dimensionally through the industrial computer, and using a high-precision 2D laser displacement sensor to obtain the three-dimensional profile of the sample surface;
[0043] Step 300, converting the three-dimensional contour of the sample surface to the coordinate system of the three-dimensional translation stage;
[0044] Step 400, converting the coordinate system where the interferometer probe is located to the coordinate system of the three-dimensional translation platform;
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