Piezoelectric MEMS microphone

A microphone and piezoelectric technology, which is applied in the field of sound and electricity, can solve the problems of low resonant frequency of the microphone, too long, and reduce the sensitivity of the microphone, and achieve the effect of improving the sensitivity and high resonant frequency.

Active Publication Date: 2020-06-16
AAC ACOUSTIC TECH (SHENZHEN) CO LTD
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  • Abstract
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  • Application Information

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Problems solved by technology

However, the length of the above diaphragm will inevitably be too long, so that the resonan

Method used

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  • Piezoelectric MEMS microphone
  • Piezoelectric MEMS microphone
  • Piezoelectric MEMS microphone

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Embodiment Construction

[0025] The following will clearly and completely describe the technical solutions in the embodiments of the present invention with reference to the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only some, not all, embodiments of the present invention. Based on the embodiments of the present invention, all other embodiments obtained by persons of ordinary skill in the art without making creative efforts belong to the protection scope of the present invention.

[0026] Please also see Figure 1-5 , the piezoelectric MEMS microphone 100 provided according to the present invention includes: a substrate 2 having a back cavity 20 and a piezoelectric diaphragm 1 disposed facing the back cavity 20 .

[0027] The piezoelectric diaphragm 1 includes a support portion 12 disposed above the back cavity 20 . The support part 12 divides the piezoelectric diaphragm 1 into at least two vibration regions 10 . In this embodiment, th...

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Abstract

The invention provides a piezoelectric MEMS microphone. The piezoelectric MEMS microphone comprises: a substrate with a back cavity; and a piezoelectric vibrating diaphragm which is arranged right opposite to the back cavity and comprises a supporting part arranged above the back cavity, wherein the piezoelectric vibrating diaphragm is divided into at least two vibrating areas by the supporting part, the piezoelectric vibrating diaphragm further comprises at least one diaphragm arranged in each vibrating area, each diaphragm comprises a fixed end connected with the substrate or the supportingpart, a free end parallel to the fixed end and arranged oppositely, and a main body part connected with the fixed end and the free end, and the free end and the main body part are both suspended abovethe back cavity, and the width of the main body part is gradually reduced from the fixed end to the free end. Compared with the prior art, the piezoelectric MEMS microphone has the advantages that the resonant frequency is high, the sound pressure utilization area is large, and the sensitivity of the microphone is further improved.

Description

【Technical field】 [0001] The invention relates to the field of acoustic and electric technologies, in particular to a piezoelectric MEMS microphone. 【Background technique】 [0002] MEMS microphone refers to a microphone based on MEMS (Microelectromechanical Systems) technology, that is, a micro-microphone made on a silicon micro-substrate using MEMS processing technology, so it is also called a silicon micro-microphone. [0003] Different from traditional microphones, MEMS microphones have the characteristics of small size, light weight, simple installation, easy formation of arrays, low cost, and mass production. They are widely used in mobile phones, notebook computers, etc. in the consumer electronics field, hands-free phones in the automotive field, and medical fields hearing aids etc. [0004] The piezoelectric MEMS microphone of the related art includes a plurality of tapered diaphragms, the diaphragms have a fixed end, a main body and a free end in sequence, the main...

Claims

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Application Information

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IPC IPC(8): H04R19/00H04R19/04H04R31/00
CPCH04R19/005H04R19/04H04R31/003
Inventor 石正雨童贝李杨
Owner AAC ACOUSTIC TECH (SHENZHEN) CO LTD
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