An Enhanced Coupling Three-Dimensional Hairpin Filter Using TSV Technology
A filter and coupling technology, applied in the field of filters, can solve problems such as poor filtering performance
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[0019] The present invention will be described in detail below in combination with specific embodiments.
[0020] An enhanced coupling three-dimensional hairpin filter using TSV technology, including RDL to make a filter coupling structure, and adopting TSV for signal transmission between two adjacent filter coupling structures.
[0021] The RDL-made filter coupling structure of each layer includes four resonant cavities, and each resonant cavity is in one-to-one correspondence with the resonant cavities of the adjacent RDL-made filter coupling structure.
[0022] Each resonant cavity includes three lines. The upper U-shaped structure of the resonant cavity represents the series connection of an inductor and a capacitor in the circuit, and the lower U-shaped structure represents the parallel connection of an inductor and a capacitor in the circuit.
[0023] Each line communicates with the three lines of the corresponding resonant cavity through the TSV.
[0024] Several TSVs ...
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