Ionizer management system for monitoring performance of ionizers

Abstract

The present invention relates to an ionizer management system for monitoring the performance of a plurality of ionizers, and more particularly, to an ionizer management system capable of efficiently monitoring the performance of ionizers without omission in a manufacturing system requiring a considerable number of ionizers using a wireless network. The ionizer management system for monitoring theperformance of a plurality of ionizers, according to the present invention, comprises: a plurality of sensor units; a plurality of slave modules; at least one main module; a gateway module; a management server.

Description

technical field [0001] The present invention relates to an ion generator management system that monitors the performance of a plurality of ion generators or the positive pressure of a charged body that is the object of ion generator destaticization. An ionizer management system that efficiently monitors the performance of the ionizer or the positive pressure of the charged body in the system. Background technique [0002] Generally speaking, in the manufacturing process of electronic equipment, LCD, semiconductor, etc., in order to prevent fine dust from adhering to electronic equipment, LCD, semiconductor wafers, or damage to components due to static electricity, static electricity removal devices are generally installed, that is, ion generators device. [0003] Such ionizers can be broadly classified into corona discharge type devices and X-ray radiation type devices. Recently, overcoming the sputtering phenomenon caused by high voltage discharge of corona discharge type ...

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Problems solved by technology

[0008] However, in this conventional ion generator management system, the performance monitoring sensor units and the sensor unit and the gateway are connected by the serial wired communication method 2a, so there has always been a problem of increased wiring complexity due to wired connections. Due to the inconvenience of construction, excessive construction costs and construction time are required, and there is a problem that it is difficult to identify and systematically and efficiently manage the sensor unit and gateway as each node

[0009] Moreover, the ion generator management system of the prior art uses the serial wired communication method 2a, so as figure 1 As shown, when a communication interruption occurs on the communication path, there is a problem that the sensing information of the sensor unit as the lower node cannot be transmitted to the server from the location where the communication interruption 2b occurs.

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