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Operation method of baking equipment

A technology of baking equipment and operation method, which can be applied to the device for coating liquid on the surface, pretreatment surface, coating and other directions, which can solve the problems of uneven thickness of organic film layer, affecting the evaporation rate of solvent, affecting product quality, etc. , to increase the heating uniformity, ensure the uniformity of the film thickness, and increase the yield.

Active Publication Date: 2022-05-03
TCL CHINA STAR OPTOELECTRONICS TECH CO LTD
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0003] However, when using the existing baking equipment to bake the substrate, the substrate will be in contact with the carrying mechanism in the baking equipment, which will cause uneven heating of the substrate, affect the evaporation rate of the solvent, and cause the organic film formed after drying The thickness of the film is not uniform, which will affect the quality of the product

Method used

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  • Operation method of baking equipment

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Embodiment Construction

[0033] The technical solutions in the embodiments of the present application will be clearly and completely described below in conjunction with the drawings in the embodiments of the present application. Apparently, the described embodiments are only some of the embodiments of this application, not all of them. Based on the embodiments in this application, all other embodiments obtained by those skilled in the art without making creative efforts belong to the scope of protection of this application.

[0034] In the description of the present application, it should be understood that the terms "center", "longitudinal", "transverse", "length", "width", "thickness", "upper", "lower", "front", " Orientation indicated by rear, left, right, vertical, horizontal, top, bottom, inside, outside, clockwise, counterclockwise, etc. The positional relationship is based on the orientation or positional relationship shown in the drawings, which is only for the convenience of describing the a...

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Abstract

The present application discloses an operation method of a baking equipment. The baking equipment includes a heating plate, a clamping device, and a transfer device. The clamping device is arranged above the heating plate to fix the substrate on the Above the heating plate, the heating plate is provided with a plurality of blowing holes and a plurality of support holes interlaced, and the plurality of blowing holes are used to blow air to the substrate to form an air flotation, and the transfer device passes through The plurality of support holes are used to support the substrate. Compared with the prior art, the present application separates the substrate from the heating plate to improve the heating uniformity of the substrate, ensure the uniformity of the film thickness of the film, and form an air flotation In order to improve the flatness of the substrate, a transfer device that can flexibly pick and place the substrate is provided to improve the efficiency of the baking operation.

Description

technical field [0001] The present application relates to the field of display technology, in particular to the field of display panel manufacturing technology, and in particular to a method for operating a baking device. Background technique [0002] At present, in the display panel manufacturing process, a production process of organic solution film formation is: coating the solution on a clean substrate, baking the solution coated on the substrate, and evaporating the solvent in the solution to form a preliminary film. [0003] However, when using the existing baking equipment to bake the substrate, the substrate will be in contact with the carrying mechanism in the baking equipment, which will cause uneven heating of the substrate, affect the evaporation rate of the solvent, and cause the organic film formed after drying The film thickness is not uniform, which will affect the product quality. Contents of the invention [0004] The embodiment of the present applicatio...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): B05D3/04
CPCB05D3/0413
Inventor 邹家鹏
Owner TCL CHINA STAR OPTOELECTRONICS TECH CO LTD
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