Atmospheric pressure radio frequency thermal plasma generator based on pre-ionization ignition device
A thermal plasma and ignition device technology, applied in the direction of plasma, electrical components, etc., can solve the problems of low overall concentration of ionized particles, small auxiliary discharge area, impurity pollution, etc. The effect of increasing the volume
Active Publication Date: 2020-07-31
SHENZHEN INST OF ADVANCED TECH
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Problems solved by technology
The existing auxiliary ignition method has impurity pollution, a small auxiliary discharge area, and a low overall concentration of ionized particles. After the ignition is completed, it is necessary to manually remove the Tesla coil or metal rod placed in the radio frequency thermal plasma discharge area. It is unrealistic for some plasma systems equipped with chambers that need to control the atmosphere, thus greatly limiting the application of atmospheric pressure RF thermal plasma technology
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[0021] Various exemplary embodiments of the present invention will now be described in detail with reference to the accompanying drawings. It should be noted that the relative arrangements of components and steps, numerical expressions and numerical values set forth in these embodiments do not limit the scope of the present invention unless specifically stated otherwise.
[0022] The following description of at least one exemplary embodiment is merely illustrative in nature and in no way taken as limiting the invention, its application or uses.
[0023] Techniques, methods and devices known to those of ordinary skill in the relevant art may not be discussed in detail, but where appropriate, such techniques, methods and devices should be considered part of the description.
[0024] In all examples shown and discussed herein, any specific values should be construed as exemplary only, and not as limitations. Therefore, other instances of the exemplary embodiment may have dif...
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The invention discloses an atmospheric pressure radio frequency thermal plasma generator based on a pre-ionization ignition device. The generator is an atmospheric pressure radio frequency inductivelycoupled plasma generator and comprises a pre-ionization ignition device and an inductively coupled plasma torch tube, wherein the inductively coupled plasma torch tube comprises an inner tube, a middle tube, an outer tube and a metal coil surrounding the outer tube; the pre-ionization ignition device is used for providing seed electrons for the thermal plasma and is of a double-dielectric barrierdischarge structure composed of a positive electrode and a grounding electrode, wherein the positive electrode is arranged in the inner tube and wrapped by an insulating dielectric layer coaxial withthe inner tube, and the grounding electrode surrounds the inner tube. The pre-ionization ignition device is additionally arranged in the generator, so that a convenient and practical technical schemeis provided for solving the problem of breakdown ignition of atmospheric pressure radio frequency thermal plasmas, the volume of the plasmas is increased, and pretreatment of fed materials is realized.
Description
technical field [0001] The invention relates to the field of plasma generators, in particular to an atmospheric pressure radio frequency thermal plasma generator based on a pre-ionization ignition device. Background technique [0002] The main way of low temperature plasma generation is gas discharge. The current gas discharge is mainly carried out under vacuum. From the perspective of application, the vacuum system equipment required by the plasma generated in the vacuum environment is complex, expensive and harsh. The discharge plasma under atmospheric pressure does not require expensive and complicated vacuum systems, which is particularly beneficial to industrial applications, not only improving efficiency but also significantly reducing production costs. [0003] At present, the plasmas generated under atmospheric pressure conditions include cold plasmas and hot plasmas. Their essence lies in the different mechanisms of the electromagnetic field in the plasma to transf...
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Login to View More IPC IPC(8): H05H1/46H05H1/24
CPCH05H1/46H05H1/24
Inventor 周秋娇陆星铭张永亮江敏黄逸凡
Owner SHENZHEN INST OF ADVANCED TECH