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Probe spacing calibration method and test method for contact resistivity and interface resistivity

A technology of contact resistivity and calibration method, applied in the direction of measuring resistance/reactance/impedance, components of electrical measuring instruments, measuring electricity, etc., can solve the error of instrument measurement results, large probe tip area, and preset spacing Error and other issues

Active Publication Date: 2020-08-04
GUILIN UNIV OF ELECTRONIC TECH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0002] In the related art, due to the long suspended part of the probes of the Seebeck coefficient and volume resistivity tester, the probes will be bent, or due to the bending of the ceramic tube wrapped around the probes, the actual distance between the probes is different from that of the probes. There is an error between the preset spacing, or the area of ​​the probe tip is large, which will lead to errors in the measurement results of the instrument

Method used

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  • Probe spacing calibration method and test method for contact resistivity and interface resistivity
  • Probe spacing calibration method and test method for contact resistivity and interface resistivity
  • Probe spacing calibration method and test method for contact resistivity and interface resistivity

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Embodiment 1

[0053] Such as figure 1 , Figure 6 to Figure 10 As shown, the first aspect of the present invention provides a kind of calibration method of probe spacing, is used for Seebeck coefficient and volume resistivity tester, comprises:

[0054] Step S102: Adjust the spacing between the probes to a plurality of different preset spacings, and obtain the first resistance obtained by testing the first sample at any preset spacing;

[0055] Step S104: Determine a first linear relationship between the first resistance and the preset spacing according to the first resistance measured at the plurality of preset spacings and the corresponding preset spacing;

[0056] Step S106: Deduce a first mathematical relationship between the first resistance and the preset distance according to the first preset formula;

[0057] Step S108: According to the corresponding relationship between the first linear relationship and the first mathematical relationship, determine the spacing error of the probe...

Embodiment 2

[0063] Such as figure 2 As shown, the calibration method of the probe spacing provided by one embodiment of the present invention includes:

[0064] Step S202: Adjust the spacing between the probes to a plurality of different preset spacings, and obtain the first resistance obtained by testing the first sample at any preset spacing;

[0065] Step S204: Determine a first linear relationship between the first resistance and the preset spacing according to the plurality of preset spacings and the first resistance measured at the corresponding preset spacing;

[0066] Step S206: Deduce a first mathematical relationship between the first resistance and the preset distance according to the first preset formula;

[0067] Step S208: the slope of the first linear relationship is equal to the first slope of the first mathematical relationship;

[0068] Step S210: the intercept of the first linear relationship is equal to the first intercept of the first mathematical relationship;

...

Embodiment 3

[0080] According to the second aspect of the present invention, such as image 3 , Figure 11 to Figure 15 As shown, a test method for contact resistivity is provided, which is used for Seebeck coefficient and volume resistivity tester, including:

[0081] Step S302: Using the calibration method of the probe spacing provided by the present invention, determine the actual spacing corresponding to any preset spacing;

[0082] Step S304: Adjust the spacing between the probes to a plurality of different preset spacings, and obtain the second resistance obtained by measuring the second sample at any preset spacing;

[0083] Step S306: Determine a second linear relationship between the second resistors and the actual spacing according to the plurality of second resistors and the actual spacing corresponding to the preset spacing;

[0084] Step S308: Deduce a second mathematical relationship between the second resistance and the actual spacing according to the first preset formula;...

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Abstract

The invention provides a probe spacing calibration method, a test method for contact resistivity and a test method for interface resistivity. The probe spacing calibration method comprises the steps:adjusting the spacing between probes to be a plurality of different preset spacing, and obtaining first resistance obtained by testing a first sample at any preset spacing; determining a first linearrelationship between the first resistance and the preset spacing according to the plurality of preset spacing and the first resistance measured under the corresponding preset spacing; deriving a firstmathematical relation between the first resistance and the preset spacing according to a first preset formula, and determining the distance error of the probe according to a corresponding relation between the first linear relation and the first mathematical relation; and determining the actual spacing of the probe according to the preset spacing and the spacing error. According to the probe spacing calibration method, the error between the actual spacing of the probe and the preset spacing caused by the deformation of the probe or the area of the tip of the probe during measurement is eliminated, and the measurement precision of an instrument is improved.

Description

technical field [0001] The invention relates to the technical field of resistivity measurement, in particular to a probe spacing calibration method, a contact resistivity test method and an interface resistivity test method. Background technique [0002] In the related art, due to the long suspended part of the probes of the Seebeck coefficient and volume resistivity tester, the probes will be bent, or due to the bending of the ceramic tube wrapped around the probes, the actual distance between the probes is different from that of the probes. There is an error between the preset intervals of the instrument, or the area of ​​the probe tip is large, which will lead to errors in the measurement results of the instrument. Contents of the invention [0003] The present invention aims to solve at least one of the technical problems existing in the prior art or related art. [0004] To this end, the first aspect of the present invention proposes a method for calibrating the dist...

Claims

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Application Information

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IPC IPC(8): G01R27/02G01R1/067
CPCG01R27/02G01R1/06711
Inventor 胡晓凯
Owner GUILIN UNIV OF ELECTRONIC TECH
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