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High vibration resistance electronic speckle interferometry system and method

An electronic speckle interferometry and measurement system technology, applied in the field of high vibration resistance electronic speckle interferometry systems, can solve the problems of slow measurement speed, speckle image phase difference deviation, inability to accurately measure displacement or displacement derivatives, and shorten the acquisition time. time, ensuring precise measurements, reducing sensitivity

Active Publication Date: 2021-10-19
SHANGHAI UNIV OF ENG SCI +1
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0005] However, when these existing technologies are dynamically tested on the engineering site, the quality of the phase diagram and the effect of phase processing are still greatly affected by environmental vibration factors, especially when there is vibration and noise in the surrounding environment, it is basically impossible to perform displacement or displacement. Accurate Measurement of Derivatives
The main reason for this problem is that the existing phase processing methods generally adopt a step-by-step control method (for example, using a piezoelectric phase shifter to generate a multi-step phase shift), which greatly limits the performance of piezoelectric ceramics. The dynamic response and the frame rate of the camera will result in a slow measurement speed. Usually, it takes at least 100ms to complete a phase measurement
During this measurement period, environmental vibration and air disturbance will cause the deviation of the phase difference of the speckle image collected during the phase shift, which will lead to inaccurate phase measurement results and even make the measurement work impossible
Therefore, the existing electronic speckle interferometry system is usually required to work in a relatively stable environment, and it is difficult to implement measurement work in general environments such as engineering sites

Method used

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  • High vibration resistance electronic speckle interferometry system and method
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  • High vibration resistance electronic speckle interferometry system and method

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Embodiment 1

[0054] see Figure 1-2 , figure 1 It is a schematic structural diagram of a high-vibration-resistant electronic speckle interferometry system according to a preferred embodiment of the present invention; figure 2 It is a synchronous control schematic diagram of a high-speed camera and a piezoelectric ceramic phase shifter according to a preferred embodiment of the present invention. This highly vibration-resistant electronic speckle interferometry system includes:

[0055] Michelson interferometer, which includes a phase-shift mirror and a high-speed camera;

[0056] piezoelectric ceramics for moving the phase shift mirror back and forth;

[0057] a driver for driving the piezoelectric ceramic;

[0058] The controller is connected to the driver and the high-speed camera respectively, and is used to send a synchronous first signal and a second signal, the first signal is used to control the high-speed camera to take pictures, and the second signal is a sinusoidal voltage s...

Embodiment approach

[0063] According to yet another preferred embodiment of the present invention, said 4t is less than the period T of air disturbance or environmental vibration. It can be understood that this can reduce or prevent disturbance of the air or vibration of the environment from disturbing the measurement.

[0064] According to another preferred embodiment of the present invention, the 4t is less than T / 4, T / 8, T / 10, T / 20 or T / 30. Studies have shown that this can further prevent air turbulence and / or environmental vibration from interfering with the measurement, and at the same time, can relatively reduce the cost of the system.

[0065] According to another preferred embodiment of the present invention, the I A , I B , I C , I D The phase difference between the two is π / 2, expressed as follows:

[0066]

[0067]

[0068]

[0069]

[0070] Among them, I 0 is the background light intensity of the speckle pattern, μ is the amplitude of the modulated light intensity, ...

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Abstract

A high-vibration-resistant electronic speckle interferometry system is provided, which includes: Michelson interferometer, which includes a phase shift mirror and a high-speed camera; piezoelectric ceramics, used to move the phase shift mirror back and forth; a driver, used to drive the phase shift mirror Piezoelectric ceramics; the controller is connected to the driver and the high-speed camera respectively, and is used to send a synchronous first signal and a second signal, the first signal is used to control the high-speed camera to take pictures, and the second signal It is a sinusoidal voltage signal and is used to drive the piezoelectric ceramic; wherein, the high-speed camera collects four moments of A, B, C and D at equal time intervals in the middle 4t of the rising section of the sinusoidal voltage signal with a cycle t The four speckle interference images obtained corresponding light intensity distribution I A , I B , I C , I D , the displacement of the phase shift mirror in the 4t time is 3λ / 8, λ is the wavelength of the interference light; and the processor is used to calculate the out-of-plane displacement of the measured object based on the four speckle interference images and / or Out-of-plane displacement derivative.

Description

technical field [0001] The invention relates to a high-vibration-resistant electronic speckle interferometry system and method, belonging to the field of photoelectric detection. Background technique [0002] Electronic speckle interferometry (ESPI), as a precision optical measurement technology, has been widely used in various optical interference precision measurement and non-destructive testing fields in recent years because of its advantages of fast, full-field, and large-area. The introduction of time phase shift technology has greatly improved the image quality and measurement accuracy of the electronic speckle interferometry technology, making the electronic speckle interferometry truly develop into a high-precision optical measurement method. [0003] The existing electronic speckle interferometric phase shift system with time phase shift function has greatly reduced the requirements for environmental vibration isolation. For example, Chinese patent 200610147704.7 d...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01B11/02
CPCG01B11/02
Inventor 刘斌王虎邢瑞英孙晓飞王业腾王文博占明明刘轩鲁国林孙霖
Owner SHANGHAI UNIV OF ENG SCI