A heavy ion irradiation system and irradiation method
A technology of ion irradiation and irradiation, applied in the field of heavy ion irradiation system and irradiation, can solve the problems of low test efficiency and achieve the effect of increasing the temperature dimension
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[0036] According to an embodiment of the present invention, the transverse gradient dose control device includes a liquid nitrogen cooling / lifting / rotating sample stage, and the sample stage includes a lifting mechanism, a rotating mechanism, and a sample holder cooled by liquid nitrogen; It is used to efficiently absorb the radiant heat brought by the ion beam, so as to keep the sample test process always at a low temperature. The sample holder fixes the sample, and the lifting mechanism can drive the sample holder up and down, that is, to drive the sample to lift; the rotating mechanism can drive the sample holder to rotate along the axial direction, that is, to drive the sample to rotate. For example, samples can be fixed on four different faces of the quadrangular prism sample holder, and the sample that needs to be irradiated can be rotated to that face. The ability to rotate increases the number of samples that can be mounted at one time. Both the lifting mechanism and ...
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