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Silicon wafer cleaning machine

A technology for cleaning silicon wafers and cleaning baskets, applied in cleaning methods and utensils, cleaning methods using liquids, electrical components, etc., can solve the problems of unstable amplitude of the carrying basket, difficult to achieve good cleaning of silicon wafers, etc., to reduce scratches The effect of high risk, not easy to deform, and long service life

Pending Publication Date: 2020-09-01
BEIJING NAURA MICROELECTRONICS EQUIP CO LTD
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  • Abstract
  • Description
  • Claims
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Problems solved by technology

However, the cantilever cleaner will cause the vibration amplitude of the carrier basket to be unstable, making it difficult to achieve a good cleaning of the silicon wafer

Method used

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  • Silicon wafer cleaning machine
  • Silicon wafer cleaning machine
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Embodiment Construction

[0027] In order to make the purpose, technical solution and advantages of the present application clearer, the technical solution of the present application will be clearly and completely described below in conjunction with specific embodiments of the present application and corresponding drawings. Apparently, the described embodiments are only some of the embodiments of the present application, rather than all the embodiments. Based on the embodiments in this application, all other embodiments obtained by persons of ordinary skill in the art without making creative efforts belong to the scope of protection of this application.

[0028] figure 1 A silicon wafer cleaning machine 1 according to an embodiment of the present application is schematically shown. like figure 1 As shown, the silicon wafer cleaning machine 1 includes a rack 100 and a cleaning basket 200 . The cleaning basket 200 is used to carry silicon wafers 230 . The silicon wafer cleaning machine 1 may also inc...

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Abstract

The invention discloses a silicon wafer cleaning machine. The silicon wafer cleaning machine comprises a rack which comprises two cantilevers which are oppositely arranged at an interval; a cleaning basket of which the two ends are respectively arranged on the two cantilevers; a driving mechanism which comprises two cams and two followers matched with the corresponding cams respectively, wherein the two cantilevers are connected with the corresponding followers so as to drive the two cantilevers to move synchronously in an up-and-down reciprocating manner and drive the cleaning basket to movein an up-and-down reciprocating manner. According to the silicon wafer cleaning machine, when the silicon wafers are cleaned, the vibration stability of the bearing basket is good, and the silicon wafers can be well cleaned.

Description

technical field [0001] The present application relates to the field of semiconductor device manufacturing, in particular to a silicon wafer cleaning machine. Background technique [0002] In the manufacturing process of semiconductor devices, the cleanliness of the silicon wafer surface is very important, because any contamination on the silicon wafer surface may adversely affect the quality of the fabricated devices. [0003] In the prior art, the carrier basket carrying the silicon wafers is usually hung on a cantilever cleaning machine for cleaning. However, the cantilever cleaning will cause the vibration amplitude of the carrying basket to be unstable, making it difficult to clean the silicon wafer well. Contents of the invention [0004] According to the present invention, a silicon wafer cleaning machine is proposed, comprising: a frame, the frame includes two cantilevers arranged at a distance from each other, and a cleaning basket, the two ends of the cleaning ba...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H01L21/67H01L21/673B08B3/04
CPCH01L21/67057H01L21/67313B08B3/041B08B3/047Y02P70/50
Inventor 胡睿凡王笑非王锐廷
Owner BEIJING NAURA MICROELECTRONICS EQUIP CO LTD
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