Processing method for inner wall of steel cylinder filled with high-purity halogen mixed gas
A treatment method and a mixed gas technology, which are applied in the directions of cleaning methods and utensils, chemical instruments and methods, surface polishing machine tools, etc., can solve the problems such as the inner wall treatment technology of high-purity halogen mixed gas cylinders that have not yet been found.
Active Publication Date: 2020-09-04
岳阳凯美特电子特种稀有气体有限公司
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Problems solved by technology
[0003] At present, there is no treatment technology for the inner wall of the steel cylinder filled with high-purity halogen mixed gas
Method used
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[0035] The processing method of the inner wall of the steel cylinder filled with high-purity halogen mixed gas of the present invention is as follows:
[0036] Step 1. Put an optical inspection lamp through the mouth of the steel cylinder to be filled with high-purity halogen mixed gas, including new steel cylinders and steel cylinders that have been used at least once, into the inner cavity of the steel cylinder, and check the inner wall of the steel cylinder through the mouth of the steel cylinder with naked eyes. If there are residues, tiny water droplets and other residues, start a vacuum device, suck the residue through the suction head of the vacuum device, and then stop the vacuum device;
[0037] Step 2. Fix the steel cylinder treated in step 1 on the sandblasting drum of a sandblasting device, start the sandblasting device, the steel cylinder and the sandblasting drum rotate together, and spray continuously toward the inner wall of the steel cylinder through the sandbl...
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Abstract
A processing method for the inner wall of a steel cylinder filled with high-purity halogen mixed gas sequentially includes the steps of thoroughly sucking away residues in the steel cylinder through asucking head of a vacuum device, injecting steel balls to the inner wall of the steel cylinder through a sand blasting head of a sand blasting device, polishing the inner wall of the steel cylinder by rotating a polishing material in the steel cylinder, flushing the inner wall of the steel cylinder with deionized water, purging the inner wall of the steel cylinder with dry air, and installing a port valve on a port of the steel cylinder to vacuumize an inner cavity of the steel cylinder. A roughness Ra of the inner wall of the steel cylinder filled with high-purity halogen mixed gas and processed through the processing method is less than 0.4 micron, and an unexpected technical effect is realized.
Description
technical field [0001] The invention relates to the treatment of the inner wall of a steel cylinder filled with gas, in particular to a treatment method for the inner wall of a steel cylinder filled with high-purity halogen mixed gas. Background technique [0002] Electronic-grade high-purity fluorine reference molecule laser gas is widely used as photolithography gas for semiconductor chips and gas for excimer laser surgery in medical ophthalmology. Hydrogen chloride reference molecule laser gas is mainly used in OLED annealing and quenching process. Fluorine gas is the most active oxidant, reacting with almost all substances, and hydrogen chloride is highly corrosive, so this kind of halogen mixed gas has special requirements for filling steel cylinders. The inner wall of the unpolished steel cylinder is rough, and various impurities such as water are adsorbed by the rough inner wall of the steel cylinder, and react with the fluorine component or hydrogen chloride componen...
Claims
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IPC IPC(8): B24B1/00B24B31/02B24C1/08C09G1/02B08B9/093
CPCB24C1/086B24B31/0224B24B1/00C09G1/02B08B9/093
Inventor 胡新明祝恩福
Owner 岳阳凯美特电子特种稀有气体有限公司