Error compensation method of high-precision pressure sensor

Abstract

The invention relates to the technical field of sensors, in particular to an error compensation method for a high-precision pressure sensor. The method comprises the steps of calibration, fine adjustment, measurement and compensation. The pressure sensor comprises a shell, a base body, a strain film and an induction resistor; the base body is arranged in the shell, and a foundation pit is formed in the center of the upper portion of the base body. The strain film is arranged on the foundation pit; since the pressure sensor is interfered by errors in measurement, the accuracy of the measured pressure value can be damaged, deviation errors, sensitivity errors and linear errors of the pressure sensor are difficult to completely eliminate, so that the application effect of the high-precision pressure sensor is hindered. Therefore, according to the invention, with the calibration fine adjustment and measurement compensation method, generated sample data are utilized to analyze a related compensation function, the function is fed back and applied to the pressure sensor in actual use, the standing step in the measurement process is controlled, and compensation processing is carried out onthe data after stabilizing the measurement state, thereby improving the application effect of the high-precision pressure sensor.

Description

technical field [0001] The invention relates to the technical field of sensors, in particular to an error compensation method for a high-precision pressure sensor. Background technique [0002] A pressure sensor is usually composed of a pressure sensitive element and a signal processing unit. It is a device or device that converts the sensed pressure signal into an electrical signal that can be output according to a certain rule; when selecting a pressure sensor, its comprehensive accuracy needs to be considered, and the corresponding error should be taken The compensation method is to improve the measurement accuracy of the pressure sensor, so as to improve the improvement effect of the measurement data on the subsequent debugging process; for the introduction of the error compensation method of the pressure sensor, please refer to: Zhu Longjun, High-precision error compensation algorithm for diffused silicon pressure sensor[J ], Automation and Instrumentation, 2012(No.3).5...

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Problems solved by technology

[0003] Current pressure sensors have offset errors, sensitivity errors, linearity errors, and hysteresis errors in use; these types of errors are accompanied by the effects of temperature and air pressure in the application environment, which increases the error interference encountered by the sensor in use , it is necessary to carry out corresponding error compensation, eliminate the influence of environmental factors on the pressure sensor, and maintain the application effect of high-precision pressure sensor

[0004] In the prior art, there are also some technical solutions about the error compensation method of high-precision pressure sensors. For example, a Chinese patent with application number 2006101613003 discloses an error compensation method for high-precision pressure sensors, using an oven and a standard pressure source Collect the output data of sensors at N temperature points and M pressure points to form an N*M order matrix; establish a mathematical model of sensor output, and fit the temperature compensation coefficients a(T) and b(T) of the sensor output function according to the collected data , c(T) and the zero output U of the sensor at different temperatures 0 (T)=f(T), and write the parameters into the microprocessor; when in use, click reset at zero pressure, and record the zero output U of the sensor 0 , by collecting temperature information T and calculating U 0 (T), and then calculate the time drift of the sensor in the use and compensation period Δ=U 0 -U 0 (T); the microprocessor collects the temperature information T and the output signal U of the pressure sensor, according to the compensation formula P=a(T)(U-Δ) 2 +b(T)(U-Δ)+c(T) calculates the output of the conditioned microprocessor. In this technical solution, the design and production technology of pressure sensitive components, signal conditioning technology, and computer technology are combined to achieve a wide temperature range. Pressure sensor calibration; the effect of pressure signal characteristics is excellent; however, this technical solution focuses on compensating the errors generated by the calculation of data on the algorithm, while ignoring the errors generated between the pressure sensor's own structural relationship in the application, which limits the error Problems with effective application of compensation effects

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