A Nonlinear Self-Correcting Resonant Surface Acoustic Wave Temperature Sensor

Abstract

A nonlinear self-correcting resonant surface acoustic wave temperature sensor includes a substrate, an interdigital transducer, a first metal reflection grid array and a second metal reflection grid array. The surface acoustic wave on the substrate has natural unidirectionality in the direction of phase velocity propagation, and there is a power flow angle PFA between the direction of group velocity propagation and the direction of phase velocity propagation, and |PFA|≤10°; interdigital transducers, first metal reflectors The acoustic aperture direction of the grating array and the second metal reflective grating array is perpendicular to the direction of phase velocity propagation, and the direction of the interdigital transducer bus bar is parallel to the direction of the power flow angle PFA; the resonant surface acoustic wave temperature sensor designed in this way has low frequency and high The present invention utilizes its two characteristic resonant peaks of low frequency and high frequency to realize the non-linear self-correction of the sensor through the self-differentiation method, and maintains the small volume of a single device, while avoiding the existing single resonator When a single resonance peak is used, the demodulation of the frequency signal is affected by the wireless path, which realizes the calibration-free process of the sensor during use.

Description

technical field [0001] The invention relates to a nonlinear self-correcting resonant surface acoustic wave temperature sensor, which belongs to the field of sensor design. Background technique [0002] The wireless passive resonant surface acoustic wave temperature sensor is a passive sensor developed by means of a wireless reading system and a surface acoustic wave resonator. This sensor has its unique advantage that it does not require any energy supply, and can be absolutely passive, which solves the problem of power consumption of active sensors; in addition, due to wireless sensing, it can be applied to harsh environments such as high voltage, highly toxic, and rotating , no need for signal transmission cables, which solves the application scene measurement that cannot be realized by traditional temperature sensors. [0003] The resonant surface acoustic wave temperature sensor is prepared by depositing metal interdigitated electrodes on the surface of the piezoelectri...

AI Technical Summary

Problems solved by technology

However, this method increases the number of resonators, requires high consistency of the fabrication process, and inevitably increases the volume of the sensor

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