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A parallel plate multi-surface detection method and fixture

A parallel flat plate and detection method technology, applied in the direction of measuring devices, instruments, optical devices, etc., can solve the problems of neglect and inaccurate solution results, and achieve the effect of accurate solution results, avoiding information loss, and simple and easy process

Active Publication Date: 2022-01-07
SHANGHAI UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

At the same time, the secondary reflection signal of the transparent DUT should be accurately solved. In traditional algorithms, the calculation of this signal is usually ignored, so that the signal is aliased in other solution results, and the solution result is not accurate enough. In high-precision measurement In the process, the solution results of this kind of signal should be fully considered, and the separation of each target signal should be completed.

Method used

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  • A parallel plate multi-surface detection method and fixture
  • A parallel plate multi-surface detection method and fixture
  • A parallel plate multi-surface detection method and fixture

Examples

Experimental program
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Effect test

Embodiment 1

[0043] In this embodiment, a parallel plate multi-surface detection method based on optimal iteration of target information is used to solve the surface shape of multi-surface transparent DUTs including secondary reflection signals, and realize accurate measurement of multi-surface transparent DUTs , including the following steps: by selecting a target piece of the same material and thickness as the measured piece as an iterative reference, the initial phase value of each surface target signal is obtained by solving the least squares equation, and then the distribution of the surface topography is solved; using the Fizeau formula The wavelength phase-shifting interferometer collects 18 interferograms, quantifies the error and guides the optimization direction based on the known information distribution on the target part, and uses the BFGS quasi-Newton method and the steepest descent method to solve the least squares equation to obtain the shape distribution of the target signal...

Embodiment 2

[0046] This embodiment is basically the same as Embodiment 1, especially in that:

[0047] In this embodiment, the iterative algorithm uses a minimum unconstrained algorithm based on the steepest descent method. The selected iterative digital signal target is the horizontal geometric centerline on the target part, and the difference between the solution value of each solution and the known curve is used as the iterative quantification error, and the reduction of the error is the optimization direction. The algorithm of minimum unconstrained optimization is selected as the optimization iterative algorithm, which can obtain the optimal solution of the solution target; when solving the phase secondary iteration, the least square method is used as the solution method to construct the solution equation, and the solution equation uses the BFGS quasi-Newton method Comparing with the traditional Gaussian elimination method, this algorithm has a higher solution accuracy than the tradit...

Embodiment 3

[0049] This embodiment is basically the same as the previous embodiment, and the special features are:

[0050] In this embodiment, in order to solve the simultaneous non-contact measurement of the transparent parallel flat plate under test, and accurately design the solution algorithm and solution parameters, the present invention proposes a parallel plate multi-surface detection method based on the optimal iteration of target information, aiming at The tested piece is a transparent parallel plate.

[0051] The basic technical principles are as follows:

[0052] By selecting a target piece with known information of the same material and thickness as the measured piece as an iterative reference, the initial phase value of each surface target signal is obtained by solving the least squares equation, and then the distribution of surface topography is solved. The solution of the least squares equation uses the BFGS quasi-Newton method, which has higher solution accuracy and appl...

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Abstract

The invention relates to a method and a fixture for parallel plate multi-surface detection based on optimal iteration based on target information, which are used to solve the surface shape of a multi-surface transparent test piece including secondary reflection signals. The Fizeau wavelength phase-shifting interferometer is used to collect the interferogram, the known information distribution on the target is used to quantify the solution error and guide the optimization direction, and the BFGS quasi-Newton method and the steepest descent method are used to solve the least squares equation to obtain the topography of the target signal on each surface distributed. The clamp of the present invention: the upper part of the clamp includes an upper clamp frame body, two threaded holes, two pairs of screws and matching nuts, three compression rod units and three upper compression matching rods, and the middle hole of the compression matching rod is used as a compression rod. Hole, built-in spring. The lower part of the clamp includes: the lower clamp frame body, two threaded holes, two lower pressing and matching rods, two rotating pressing units, one extending rod, two torsion springs, two nuts, one lower pressing head, one Rubber sleeve, two compression screws.

Description

technical field [0001] The multi-surface interference detection system of the present invention is, in particular, a system for obtaining multi-surface information of a measured object by performing optimal iteration on known target information. Background technique [0002] Precise measurement based on optical principles is the main method in the field of modern precision measurement, especially the rapid development of computing technology and various algorithms, which greatly improves the accuracy of optical measurement. Computational optical detection technology has been widely used in many fields such as manufacturing, agriculture, medicine, life science, aerospace and scientific research due to its non-contact, high sensitivity, fast response, and high measurement accuracy, and has become a modern advanced test and measurement technology. one. Transparent parallel flat plates are widely used in the optical field, their surface is smooth, with high surface quality, and...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01B11/24
CPCG01B11/2441
Inventor 常林郑维伟徐瞿磊王陈于瀛洁闫恪涛孙涛
Owner SHANGHAI UNIV