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A piezoelectric structure and piezoelectric device

A technology of piezoelectric structure and piezoelectric material, applied in the field of piezoelectric structure, can solve the problems that two electrodes or electrodes and pads cannot be electrically connected, and are not suitable for electrical connection of electrode connectors, and achieve the effect of flexible setting

Active Publication Date: 2022-05-31
AAC ACOUSTIC TECH (SHENZHEN) CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0004] The purpose of the present invention is to provide a piezoelectric structure, which aims to solve the problem in the prior art that the two electrodes or the electrodes and the pads cannot or are not suitable for direct electrical connection through the electrode connector on the surface of the piezoelectric film.

Method used

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  • A piezoelectric structure and piezoelectric device
  • A piezoelectric structure and piezoelectric device
  • A piezoelectric structure and piezoelectric device

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Embodiment Construction

[0024] The present invention will be further described below in conjunction with the accompanying drawings and embodiments.

[0025] see Figure 5 , Figure 5 It is a schematic diagram of the piezoelectric thin film electrode connection method of the first embodiment of the present invention. In an embodiment of the present invention, the piezoelectric structure includes a base 1, a thin film portion 11 disposed on the base 1, and a welding portion 8, wherein the thin film portion 11 and the welding portion 8 are arranged separately, and the thin film portion 11 includes a first stacked layer. An electrode portion 2, the piezoelectric structure also includes a fixed arm 7 located above the base 1 and a connecting portion 5 extending along the fixed arm 7, the fixed arm 7 includes a first fixed arm 73 fixedly connected to the welding portion 8, and the first fixed arm 73 The electrode portion 2 is fixedly connected to the second fixed arm 71 on the side away from the base 1 a...

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Abstract

The invention discloses a piezoelectric structure and a piezoelectric device, which include a substrate, a first conductive layer arranged above the substrate, and a second conductive layer spaced apart from the first conductive layer, and also include a A fixed arm above the base and a connecting portion extending along the fixed arm, the fixed arm includes a first fixed arm fixedly connected to the side of the first conductive layer away from the base, away from the second conductive layer The second fixed arm fixedly connected to one side of the base and the cantilever connecting the first fixed arm and the second fixed arm, the connecting part extends along the first fixed arm, the cantilever and the second fixed arm in sequence And electrically connect the second conductive layer and the first conductive layer. In the present invention, by setting the cantilever, the connection part can be avoided depending on the surface of the piezoelectric film.

Description

【Technical field】 [0001] The invention relates to the field of piezoelectric MEMS chips, in particular to piezoelectric structures. 【Background technique】 [0002] The application fields of piezoelectric MEMS devices are becoming more and more extensive, and the requirements for the reliability of devices are also getting higher and higher. The diaphragm layer of the piezoelectric MEMS in the piezoelectric MEMS device is generally composed of a single layer or multiple layers of piezoelectric materials and electrode materials. see figure 1 and figure 2 , the existing piezoelectric MEMS device is mainly a typical cantilever beam piezoelectric MEMS device, including an effective electrode 100 , a structural electrode 200 , a piezoelectric material 300 and a fixed end 400 of a piezoelectric film. [0003] see image 3 , a typical piezoelectric MEMS film includes multiple sets of effective electrode parts, such as the effective electrode parts A, B, and C shown in the figur...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): H01L41/047B81B7/02H10N30/87
CPCB81B7/02B81B2201/0257H10N30/87
Inventor 段炼张睿
Owner AAC ACOUSTIC TECH (SHENZHEN) CO LTD
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