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95results about "Investigating crystals" patented technology

Austenite structure display and grain size rating method

The invention relates to an austenite structure display and grain size rating method, and belongs to the technical field of hot continuous rolling finishing mill production methods. According to the technical scheme, the method comprises the steps that an eroded sample is manufactured, and an austenite structure display graph is obtained; carrying out deep learning network training and grain boundary processing to obtain a boundary skeleton diagram; and grading the grain size by adopting a straight line intercept point method. The method has the beneficial effects that the Inconel 625 austenite structure with a uniform erosion surface and a clear and complete austenite grain boundary can be obtained, grain size rating is carried out on the austenite structure image through a deep learning algorithm, and compared with manual rating, the efficiency and accuracy of grain size rating are greatly improved.
Owner:HEBEI DAHE MATERIAL TECH CO LTD +2

Three-dimensional visualization method for deformation dislocation Schmidt factor distribution

The invention discloses a three-dimensional visualization method for deformation dislocation Schmidt factor distribution, and the method comprises the steps: preparing a transmission sample based on a deformation sample, and obtaining a physical identifier marking the direction of an external load; dislocation images of a plurality of different angles of the transmission sample are obtained through a transmission electron microscope, three-dimensional reconstruction is carried out, and a dislocation three-dimensional image under a sample coordinate system is obtained; tilting the sample in situ, and obtaining conversion parameters of a sample coordinate system and a crystal coordinate system according to the tilting parameters and the diffraction pattern; acquiring optical images of the sample rod and the transmission sample through an optical microscope, acquiring an applied load direction under a sample coordinate system according to the optical images, and acquiring an applied load direction under a crystal coordinate system based on the conversion parameters; and determining a dislocation slippage system according to the dislocation Burkholtz vector and the dislocation three-dimensional image, and calculating to obtain a dislocation Schmidt factor by combining with the direction of the external load under the crystal coordinate system, and displaying the dislocation Schmidt factor in the three-dimensional image. According to the method, the deformation dislocation Schmidt factor can be accurately and intuitively represented in the dislocation three-dimensional image.
Owner:CHONGQING UNIV

Device for optical observation and structural analysis of hydrate crystal growth

The invention discloses a device for optical observation and structural analysis of hydrate crystal growth, and belongs to the technical field of energy scientific research instruments. The device comprises a capillary reaction kettle, a gas injection system, a detection system, a temperature control system and a data acquisition system. And the capillary reaction kettle is internally provided with a high-pressure capillary. One end of the capillary reaction kettle is connected with a gas injection system and is jointly controlled by a gas cylinder, a pressure regulating meter and a high-pressure plunger pump; a Raman observation system is arranged at a position corresponding to a visible window at the top end of the capillary reaction kettle and is used for observing and recording a hydrate crystal structure, and under a non-Raman test condition, the system can be equally replaced by a microscopic imaging system and is used for monitoring the growth form change of the hydrate crystal in real time. The internal temperature of the capillary reaction kettle is controlled by the upper cover, the main body and the internal low-temperature circulating cavity. The device can realize Raman or optical in-situ observation of full-period change of hydrate crystal growth in the capillary tube.
Owner:DALIAN UNIV OF TECH

Polarizing microscope, crystal defect evaluation device, and crystal defect evaluation method

A polarization microscope 1 includes a sample stage 4 on which a sample 8 is placed, a polarizer 3 provided on a side of the sample 8 toward a light source, and an analyzer 6 provided on a side of the sample toward an observer. At least one of the polarizer 3 and the analyzer 6 is placed such that a polarization direction is inclined with respect to an optical main axis of the sample 8 or placed such that an angle formed by a polarization direction of the analyzer 6 and a polarization direction of the polarizer is deviated from a right angle.
Owner:NAT UNIV CORP TOKAI NAT HIGHER EDUCATION & RES SYST +1

Bifocal plane imaging system and multidirectional beam splitter

The invention discloses a bifocal plane imaging system and a multidirectional beam splitter, and the bifocal plane imaging system comprises an illumination module which is configured to provide an illumination light beam for a to-be-measured piece, and the illumination light beam forms a signal light beam on the surface of the to-be-measured piece; the objective lens assembly is configured to receive the signal light beam and optically focus on the second to-be-measured layer; the light splitting assembly is arranged on an emergent light path of the objective lens assembly and is configured to split the signal light beam to form a first light beam transmitted in a first direction and a second light beam transmitted in a second direction; the first imaging module is configured to receive the first light beam in a first direction and optically focus the first light beam on a first to-be-measured layer through focusing processing, and the first light beam is used for imaging the first to-be-measured layer; and the second imaging module is configured to receive a second light beam in a second direction, and the second light beam is used for imaging a second layer to be measured. According to the invention, the detection efficiency of the two to-be-detected layers can be improved.
Owner:SKYVERSE TECH CO LTD

Urine Processing Method and Urine Testing System

PendingUS20250389668A1Material crystallisationHealth-index calculationUrinary sedimentUrine testing
The present application provides a urine processing method and a urine testing system. The method comprises processing urine to obtain urinary sediment and supernatant, performing crystallization processing on the supernatant and making analysis to obtain supernatant-related parameters, and making comprehensive analysis through combination of the supernatant-related parameters with urinary sediment-related parameters and urine dry chemistry-related parameters. The system comprises a urine processing module configured to process urine to obtain urinary sediment and supernatant, and a supernatant analysis module configured to perform crystallization processing on the supernatant and make analysis to obtain supernatant-related parameters, and to make comprehensive analysis through combination of the supernatant-related parameters with the urinary sediment-related parameters and the urine dry chemistry-related parameters.
Owner:JIANG HONGTAO +1

Crystal orientation detection system and detection method thereof

The invention relates to a crystal orientation detection system, which comprises an LED surface type array, an illumination lens, a reflector, a microscope objective, a sample stage, a tube lens, an image sensor and a computer, and is characterized in that the LED surface type array comprises m * n LED light sources which are uniformly distributed along the radial direction and the annular direction and are independently controlled by the computer; the illumination lens, the reflector and the microscope objective form an illumination light path, the microscope objective and the tube lens form a microscopic imaging light path, the reflector refracts an illumination light beam to the microscope objective at an inclination angle of 45 degrees, and the computer synchronously controls gating of the LED face type array and image acquisition of the image sensor. According to the technical scheme, the LED light source is long in service life and low in energy consumption, a complex vacuum environment and high-voltage equipment are not needed, optical assemblies such as a reflecting mirror, a microobjective and a tube mirror are mature and easy to obtain, and the overall manufacturing cost of the system is only 10%-20% of that of an electron backscatter diffractometer (EBSD) which is the most commonly used crystal orientation detection device at present.
Owner:SHANGHAI JIAOTONG UNIV

Display agent of SA-508Gr.3 steel for nuclear power and application of display agent

The invention relates to a display agent of SA-508Gr. 3 steel for nuclear power and application of the display agent, and relates to the technical field of metallographic detection. The developer is composed of sodium chloride and a solvent. By means of the display agent, a clear and complete complex structure of tempered martensite and / or tempered bainite structure of SA-508Gr.3 steel and an austenite grain boundary can be obtained through an electrolytic method, and the austenite grain size evaluation result is real and effective.
Owner:DONGFANG (GUANGZHOU) HEAVY MASCH CO LTD

Measurement method for characterizing ferrite grain size and phase fraction of duplex stainless steel

Disclosed is a measurement method for characterizing ferrite grain size and phase fraction of duplex stainless steel, including the steps of: conducting heat treatment on industrial pure iron and duplex stainless steel respectively; conducting wire cutting on the samples to obtain the samples to be tested; measuring ferrite grain diameters and phase fractions of the samples to be tested; testing the samples to be tested based on an improved U-shaped sensor probe to obtain test data; constructing a response relational database; obtaining the information of the sample of arbitrary ferrite grain size and phase fraction. The present invention adopts an innovative electromagnetic characterization method to measure single microcomponents in the steel and iron materials, which can be applied to the measurement of smaller samples and improve the measurement efficiency.
Owner:GUILIN UNIVERSITY OF TECHNOLOGY

Crystal growth uniformity dynamic monitoring method based on multi-mode photoelectron imaging

The invention discloses a crystal growth uniformity dynamic monitoring method based on multi-mode photoelectron imaging, and relates to the technical field of crystal monitoring, and the method comprises the steps: integrating a plurality of photoelectron imaging methods to monitor a crystal growth process, and obtaining multi-mode imaging data; based on a deep learning model, multi-modal imaging data is subjected to data fusion analysis, a uniformity index is calculated, a thermodynamic diagram is generated, a non-uniform region is identified, growth parameters of the non-uniform region are adjusted, a non-uniform growth rate is calculated, and a crystal sample which is judged to be unqualified is transferred, so that a plurality of photoelectron imaging methods are combined; the dynamic correlation analysis of the crystal surface chemical components and the crystal structure overcomes the limitation that the single-mode in-situ characterization technology cannot comprehensively reflect the co-evolution of the crystal surface chemical components and the crystal structure, and solves the problem that the dynamic co-evolution data of the crystal growth cannot be comprehensively reflected. The technical effect of comprehensively and dynamically monitoring the crystal growth uniformity is achieved.
Owner:SHANDONG YUNHAI GUOCHUANG CLOUD COMPUTING EQUIP IND INNOVATION CENT CO LTD

Defect classification equipment for silicon carbide substrate using single incident light-based photoluminescence and defect classification method using the same

Stack fault inspection apparatus and method are disclosed. The apparatus includes a sample stage fixing the silicon carbide substrate and allow the incident light to scan the substrate surface; an incident light source configured to irradiate a vertical illumination light of a wavelength corresponding to an energy greater than a band gap energy of the substrate to at least a portion of a surface of the substrate in a direction substantially perpendicular to the surface of the substrate; a photomultiplier tube (PMT) configured to obtain a photoluminescence mapping image having a wavelength corresponding to the band gap energy of the substrate from the surface of the substrate; and a controller configured to process the mapping image and identify stacking faults.
Owner:HORIBA STEC KOREA LTD

Crystal defect evaluation device and crystal defect evaluation method

A polarizing microscope 1 comprises a sample stage 4 for carrying a sample 8, a polarizer 3 provided on a light source side of the sample 8, and an analyzer 6 provided on a viewing side of the sample 8. The polarizer 3 and / or the analyzer 6 is installed so that the polarization direction thereof is inclined relative to the optical main axis of the sample 8, or installed so that the angle formed by the polarization direction of the analyzer 6 and the polarization direction of the polarizer 3 is other than a right angle.
Owner:NAT UNIV CORP TOKAI NAT HIGHER EDUCATION & RES SYST +1

Laser method and apparatus for analysing crystals

A method of analysing crystals is described. The method comprises focusing a laser into a crystal to induce the creation, modification, dissociation, or diffusion of one or more defects within a focal region of the laser. A signal dependent on the creation, modification, dissociation or diffusion of the one or more defects within the focal region of the laser is measured during or after the aforementioned process and used to determine one or more characteristics of the crystal being analysed. In one configuration, one or more fluorescent defects are created, modified, or dissociated and the fluorescent signal is analysed to determine the type of crystal being analysed.
Owner:OXFORD UNIVERSITY INNOVATION LTD

Method for displaying original austenite grain boundary of X80 pipeline steel

The invention discloses a method for displaying an original austenite grain boundary of X80 pipeline steel. The method mainly comprises the steps of sampling, sample preparation, corrosion and metallographic observation. The corrosive agent is characterized by comprising the following components in proportion: every 100 mL of corrosive liquid contains 5-10 g of glacial acetic acid, 10-15 g of oxalic acid, 5-10 g of ferric trichloride, 10-15 g of dishwashing liquid and the balance of high-purity water; putting the ground and polished grain size sample into the corrosive liquid with the grinding surface facing upwards, heating to 70 + / -2 DEG C, and keeping the temperature for 20-30 minutes; by adopting the method disclosed by the invention, the displayed sample grain boundary is clear and complete, and the rating requirements of manual and metallographic analysis software are met. The method provided by the invention provides more reliable conditions for accurately measuring the original austenite grain size of the X80 pipeline steel.
Owner:BAOTOU IRON & STEEL (GROUP) CO LTD

Method and device for determining grain orientation

A method for determining grain orientation is used for identifying grain orientation in an image of a metallographic sample, the metallographic sample is a non-deformable alloy and is provided with a matrix and a second phase, and the second phase is provided with a habitual plane in the plane direction of the matrix {111} and is of a strip-shaped or disc-shaped structure. The method comprises the following steps: measuring an included angle between second phases in the same crystal grain on the surface of a metallographic sample, establishing a virtual regular tetrahedron of a matrix {111} plane, and calculating an angle relation between the surface of the metallographic sample and the matrix {111} plane according to the included angle between the second phases so as to determine the crystal grain orientation. According to the method, the grain orientation is calculated by utilizing the geometrical characteristics of the alloy structure, the method is simple, the requirement on the surface state of the sample is low, the characterization efficiency is effectively improved, and the test cost is reduced. The invention further provides a device for determining the grain orientation.
Owner:AECC COMML AIRCRAFT ENGINE CO LTD

Method to measure light loss of anisotropic crystal substrate

Embodiments of the present disclosure relate to a method of optical device metrology and a device. The method includes introducing a light beam into an optical device during a first time period at an initial angle, the optical device including an anisotropic crystal optical substrate, the optical device including a first surface and a second surface, propagating the light beam through the optical device, the light beam including a transverse electric polarization light and a transverse magnetic polarization light, measuring a plurality of measurements, during the first time period, the plurality of measurements including a quantity of the transverse electric polarization light and the transverse magnetic polarization light transmitted from a plurality of locations on the first surface or the second surface during the first time period, wherein the measuring is performed by a detector, and using the measurements during the first time period to determine optical loss.
Owner:APPLIED MATERIALS INC

Noninvasive prediction method and kit for acne risk of puberty women

InactiveCN121856255AInvestigating crystalsDisease diagnosisPathological correlationSaliva sample
The invention discloses a non-invasive prediction method for acne risk of puberty women and a kit, and belongs to the technical field of biological detection. According to the present invention, the non-invasive advantage of the saliva sample is adopted, and the cycle specificity of saliva crystallization and the pathological correlation of the sex hormone ratio are combined to achieve the early accurate early warning of the acne risk, such that the problems of strong invasion and difficult promotion in the teenager group of the traditional serum detection are solved, and the characteristics of convenient operation, low cost and repeatable monitoring are provided; and a new technical means is provided for prevention and early intervention of acne of puberty women.
Owner:ZHIXUAN TECHNOLOGY (SHANGHAI) CO LTD

Optical crystal ab-plane detection device and detection method thereof

The application provides an optical crystal AB surface detection device and a detection method in the field of optical crystal detection. The position and the orientation of the hexahedral coated glass in the blue film wafer disc are quickly photographed, positioned and determined through a CCD camera. The hexahedral coated glass which needs to be turned over is exchanged and adsorbed by a vertically cooperating pickup assembly and a moving pickup assembly so that the coated surface B faces upward. A turning mechanism is not needed, the turning operation process is simplified, the rapid detection, pickup, turning and transfer of the crystal AB surface are realized, and the detection efficiency is improved. The disclosed detection method of the optical crystal AB surface replaces manual judgment and turning and transfer by using a microscope and a clamp, improves the detection speed and accuracy, and realizes rapid identification and turning and transfer.
Owner:厦门竣铭科技有限公司 +1

Method for testing the production quality of titanium alloy titanium 60 blisk

This invention relates to a method for inspecting and controlling the production quality of integral Ti60 titanium alloy bladed disks, belonging to the technical field of manufacturing key materials and components for aero-engines. The method includes processing multiple batches of billets through die forging, solution heat treatment, and aging heat treatment to form integral Ti60 titanium alloy bladed disk forgings; selecting one forging from each batch and dissecting it along its radial axis; cutting microstructure samples of different sizes from at least the blades, rims, spokes, and hub; pre-treating each microstructure sample to prepare the surface to be inspected; and using optical microscopes of different magnifications to perform microstructure testing on each inspection surface and analyze whether the parameter characteristics of β-grains and α-grains are qualified and meet preset conditions. This invention improves the efficiency of Ti60 titanium alloy integral bladed disk production quality.
Owner:AECC SICHUAN GAS TURBINE RES INST

Substrate inspection apparatus and substrate inspection method

The invention provides a substrate inspection apparatus and a substrate inspection method. The substrate inspection method includes: selecting an optimal inspection value using a test substrate; and determining at least one of a degree of crystallization and abnormal crystallization of the target substrate using the optimal inspection value. Selecting an optimal inspection value includes: capturing a focal region located in at least a portion of a test substrate; quantizing at least one of a degree of crystallization and abnormal crystallization of the test substrate; and selecting at least one of the optimal process energy density value (OPED) and the optimal abnormal crystallization determination value (OACD) as an optimal check value.
Owner:SAMSUNG DISPLAY CO LTD

Method and apparatus for determining crystallographic orientation on crystalline surfaces

A method of determining 3D crystallographic orientation on a crystalline surface of a sample. The method includes directing a beam of collimated light at a predetermined angle of incidence, wherein reflections from the crystalline surface are projected onto an image sensing unit positioned in a path of reflected light; obtaining a directional reflectance profile from an image of the reflectance pattern generated by the image sensing unit by pixelising the reflectance pattern into a pixelated-image with a center coinciding an intersection of a specularly reflected light beam and the image sensing unit; and processing the directional reflectance profile based on analyzing reflection intensity data in the pixelated-image of the directional reflectance profile to determine the crystallographic orientation of the crystalline surface. A further method including projecting the reflections onto a detector screen and capturing an image of the reflectance pattern on the detector screen.
Owner:NANYANG TECH UNIV

Crystal defect evaluation device and crystal defect evaluation method

A polarizing microscope 1 comprises a sample stage 4 for carrying a sample 8, a polarizer 3 provided on a light source side of the sample 8, and an analyzer 6 provided on a viewing side of the sample 8. The polarizer 3 and / or the analyzer 6 is installed so that the polarization direction thereof is inclined relative to the optical main axis of the sample 8, or installed so that the angle formed by the polarization direction of the analyzer 6 and the polarization direction of the polarizer 3 is other than a right angle.
Owner:NAT UNIV CORP TOKAI NAT HIGHER EDUCATION & RES SYST +1

A thermal simulation method to obtain accurate austenite grain size

The present invention discloses a thermal simulation method for obtaining accurate austenite grain size, the method is to conduct heat treatment test on MMS-200 testing machine, in the heating stage, heat preservation stage and cooling stage of the sample, relying on the cooperation of the instrument's own cooling system and pneumatic system, by manually adjusting the gear of the movable shaft cylinder, effectively solve the bulging phenomenon in the middle of the sample caused by excessively high heating temperature or too long heat preservation time. Different from the current stage, which only relies on the computer to input parameters through the system operation interface to conduct experiments, the bulging phenomenon in the middle of the sample is ignored. In contrast, the present invention can effectively avoid the sample from falling during the heating process; avoid the bulging phenomenon in the middle of the sample due to high-temperature heating and long-term heat preservation, so as to obtain accurate austenite grain size.
Owner:HUNAN VALIN XIANGTAN IRON & STEEL CO LTD

A method for detecting pure natural royal jelly freeze-dried powder

The application discloses a kind of pure natural royal jelly freeze-dried powder detection methods, it is related to quality detection technical field, the method includes the following steps: collecting the multi-dimensional original data of royal jelly freeze-dried powder, data is handled to generate data matrix, from data matrix extraction key feature index set, to index set is analyzed and evaluated to generate authenticity score, generate digital detection report and quality spectrum, based on detection result is continuously optimized.The application, by fusing near-infrared spectrum, microscopic image, physicochemical activity and block chain traceability and other multi-source heterogeneous data, intelligent evaluation is carried out using knowledge graph and lightweight multi-modal network, realizes the multi-dimensional, high-precision analysis of the pure nature, naturalness and adulteration of royal jelly freeze-dried powder.
Owner:BAOJI GUANYOUFENG PROD CO LTD

In-situ passivation of non-linear optical crystals

The invention relates to in-situ passivation of nonlinear optical crystals. In-situ passivation of a non-linear optical (NLO) crystal during operation of a characterizing tool includes converting a laser beam of a selected wavelength to a converted laser beam of a harmonic wavelength via a non-linear optical NLO crystal, and passivating the NLO crystal during conversion to the converted laser beam of the harmonic wavelength.
Owner:KLA CORP

Urine treatment method and urine detection system

PendingEP4679055A1Material crystallisationHealth-index calculation
The present application provides a urine processing method and a urine testing system. The method comprises processing urine to obtain urinary sediment and supernatant, performing crystallization processing on the supernatant and making analysis to obtain supernatant-related parameters, and making comprehensive analysis through combination of the supernatant-related parameters with urinary sediment-related parameters and urine dry chemistry-related parameters. The system comprises a urine processing module configured to process urine to obtain urinary sediment and supernatant, and a supernatant analysis module configured to perform crystallization processing on the supernatant and make analysis to obtain supernatant-related parameters, and to make comprehensive analysis through combination of the supernatant-related parameters with the urinary sediment-related parameters and the urine dry chemistry-related parameters.
Owner:JIANG HONGTAO +1

Wafer inspection apparatus

A wafer inspection apparatus is provided, which moves a macro camera and a micro camera to respective shooting positions with minimum moving units. The micro camera is arranged at an appropriate shooting position of the micro camera in accordance with a center-to-center distance corresponding to a rotation angle of a holding stage. Even in a case where a center (C0) of a holding surface and a center (C1) of a wafer are misaligned and a position of an outer periphery of the wafer in an X-axis direction varies with rotation of the holding stage, a shooting range of the micro camera can be caused to follow the position of the outer periphery of the wafer. Therefore, the shooting range of the micro camera can be easily determined. In addition, by moving both cameras in the X-axis direction with one X-axis moving mechanism, both front surface inspection of the wafer and outer periphery inspection of the wafer can be performed.
Owner:DISCO CORP

Silicon wafer defect inspection method and silicon wafer defect inspection system

In a side view, when an angle θ1 formed between the light axis of light incident on a surface of a silicon wafer and the surface (or an imaginary plane corresponding to the surface) is 67° to 78° and an angle formed between the surface of the silicon wafer (or an imaginary plane corresponding to the surface) and the detection optical axis of a photodetector is θ2, θ1−θ2 is −6° to −1° or 1° to 6°.
Owner:SUMCO CORP

A method and a device for detecting crystalline defects in a substrate by dark field and photoluminescence

The invention relates to a device (100, 200, 300) for detecting crystalline defects in an off-axis monocrystalline substrate (10), wherein the normal (2) to the surface of the substrate (10) is tilted with respect to the crystallographic growth axis (3) by a tilt angle (4), the tilt angle (4) being contained in a plane, called angle plane, perpendicular to the surface, the device (100) comprising: - at least one detector (14, 14', 14a, 14b, 14c), - at least one illumination light source (12) configured to illuminate the substrate (10) with an illuminating light beam (13), the at least one illumination light source (12) being arranged in at least one of a first position and a second position, - at least one excitation light source (19) configured to illuminate the substrate with an excitation light beam (20) configured to produce an emission of photoluminescence light by the substrate (10), - imaging means (16, 17) configured to image the substrate (10) according to a field of view on the at least one detector(14, 14', 14a, 14b, 14c), said at least one detector producing at least one image of the substrate (10), and - processing means (18) configured to detect crystalline defects using said at least one image of the substrate (10), wherein the at least one illumination light source (12) and the imaging means (16, 17) are arranged in a dark-field configuration, and wherein in the first position, the at least one illumination light source (12) is arranged such that the illuminating light beam (13) is parallel or quasi-parallel to the angle plane (4), and in the second position, the at least one illumination light source (12) is arranged such that the illuminating light beam (13) is parallel or quasi-parallel to a plane, called perpendicular plane, containing the normal (2) to the surface and being perpendicular to the angle plane. The invention also relates to a method for detecting crystalline defects in an offaxis monocrystalline substrate.
Owner:UNITY SEMICONDUCTOR

A method and a device for detecting crystalline defects in a substrate by dark field and photoluminescence

The invention relates to a device (100, 200, 300) for detecting crystalline defects in an off-axis monocrystalline substrate (10), wherein the normal (2) to the surface of the substrate (10) is tilted with respect to the crystallographic growth axis (3) by a tilt angle (4), the tilt angle (4) being contained in a plane, called angle plane, perpendicular to the surface, the device (100) comprising: - at least one detector (14, 14', 14a, 14b, 14c), - at least one illumination light source (12) configured to illuminate the substrate (10) with an illuminating light beam (13), the at least one illumination light source (12) being arranged in at least one of a first position and a second position, - at least one excitation light source (19) configured to illuminate the substrate with an excitation light beam (20) configured to produce an emission of photoluminescence light by the substrate (10), - imaging means (16, 17) configured to image the substrate (10) according to a field of view on the at least one detector(14, 14', 14a, 14b, 14c), said at least one detector producing at least one image of the substrate (10), and - processing means (18) configured to detect crystalline defects using said at least one image of the substrate (10), wherein the at least one illumination light source (12) and the imaging means (16, 17) are arranged in a dark-field configuration, and wherein in the first position, the at least one illumination light source (12) is arranged such that the illuminating light beam (13) is parallel or quasi-parallel to the angle plane (4), and in the second position, the at least one illumination light source (12) is arranged such that the illuminating light beam (13) is parallel or quasi-parallel to a plane, called perpendicular plane, containing the normal (2) to the surface and being perpendicular to the angle plane. The invention also relates to a method for detecting crystalline defects in an off-axis monocrystalline substrate.
Owner:UNITY SEMICONDUCTOR