The invention provides a method for detecting back-surface soft damage density of a silicon wafer. The method comprises the following steps of S1, thermal-oxidization processing; S2, corrosion, in which the silicon wafer obtained in the step S1 is placed in hydrofluoric acid for immersion; S3, dying, in which a chromium oxide solution is prepared, the silicon wafer obtained in the step S2 is immersed in the prepared chromium oxide solution for reaction; S4, washing with clean water; and S5, calculation. Fault is induced to be generated by thermal oxidization, an oxide layer is removed by corrosion, the fault is dyed by the chromium oxide solution, the fault occurring in an ultramicro damage layer is intuitively displayed under microscope, the method has the advantages of stability, reliability, high efficiency and convenience, a technical department can be helped to optimize a sand-blasting process or a special sand-blasting process is selected according to a client demand, daily production of a product also can be monitored, and the product quality is ensured.