Air floatation motion platform
A motion table and air flotation technology, applied in the direction of electrical components, magnetic attraction or thrust holding devices, etc., can solve the problems of high processing precision, self-excited oscillation, unfavorable engineering realization, etc., and achieve improved air flotation stiffness and dynamic performance Good, the effect of improving accuracy
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[0056] In order to make the objectives, technical solutions, and advantages of the embodiments of the present invention clearer, the following describes the embodiments of the present invention in detail with reference to the accompanying drawings. However, a person of ordinary skill in the art can understand that, in each embodiment of the present invention, many technical details are proposed for the reader to better understand the present application. However, even without these technical details and various changes and modifications based on the following embodiments, the technical solution claimed by this application can be realized.
[0057] In the following description, for the purpose of illustrating various disclosed embodiments, certain specific details are set forth to provide a thorough understanding of various disclosed embodiments. However, those skilled in the relevant art will recognize that the embodiments may be practiced without one or more of these specific de...
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