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Target feeding mechanism of coating machine

A technology of feeding mechanism and coating machine, applied in coating, metal material coating process, ion implantation coating and other directions, can solve the problems of poor tool coating, hidden safety hazards of explosion, unreasonable structural design, etc. Coating yield, avoid burst effect

Pending Publication Date: 2020-11-10
GUANGDONG UCAN ROBOT TECH CO LTD
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  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0003] The structural design used to provide coating materials in the prior art is unreasonable. On the one hand, there is a potential explosion safety hazard due to excessive temperature, and on the other hand, it is easy to cause poor tool coating due to the coating material being mixed with more impurities.

Method used

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  • Target feeding mechanism of coating machine
  • Target feeding mechanism of coating machine
  • Target feeding mechanism of coating machine

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Embodiment Construction

[0029] In order to facilitate the understanding of those skilled in the art, the present invention will be further described below in conjunction with the embodiments and accompanying drawings, and the contents mentioned in the implementation modes are not intended to limit the present invention.

[0030] see Figure 1 to Figure 5 As shown, a target feeding mechanism of a coating machine according to the present invention includes a chassis 1 and a first feeding unit 2 detachably connected to the chassis 1. The chassis 1 is surrounded by a plurality of metal plates. The chassis 1 Roughly in the shape of a hollow cuboid, the cabinet 1 is provided with an accommodating cavity 111 , and the first supply unit 2 is used for evaporating the first target material 211 from the outside into target ions entering the cabinet 1 .

[0031] The first supply unit 2 includes a first carrier 3 that is detachably connected to the cabinet 1 and is used to carry the first target material 211 , an...

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Abstract

The invention relates to the technical field of coating machines, and particularly discloses a target feeding mechanism of a coating machine. The mechanism comprises a machine box and a first feedingunit detachably connected with the machine box, wherein an accommodating cavity is arranged in the machine box, and the first feeding unit is used for evaporating an external first target into targetions entering the machine box; the first feeding unit comprises a first carrying frame detachably connected with the machine box and used for bearing the first target, a first heating unit arranged onthe first carrying frame and used for heating and evaporating the first target, a first cooling unit used for cooling the first target borne by the first carrying frame, and a first magnet arranged on the first carrying frame and acting on the target ions obtained after evaporation of the first target; the first target is cooled by the first cooling unit, so that the first target is prevented from bursting due to over-high temperature; and the target ions obtained after the evaporation of the first target are screened by Lorentz force in a magnetic field of the first magnet to enter the accommodating cavity to be deposited on a tool in the accommodating cavity, and the coating yield of the tool is increased.

Description

technical field [0001] The invention relates to the technical field of coating machines, and in particular discloses a target feeding mechanism of the coating machine. Background technique [0002] In the processing of workpieces, cutting tools are one of the basic accessories commonly used in various processing equipment. For example, electronic products need to use built-in circuit boards, and drill needles are one of the commonly used tools for drilling holes in built-in circuit boards. In order to prolong the service life of tools such as drills, it is often necessary to apply a coating to the outside of the tool. [0003] The structural design used to provide the coating material in the prior art is unreasonable. On the one hand, there is a safety hazard of explosion due to excessive temperature, and on the other hand, the coating material is easily mixed with many impurities, resulting in poor tool coating. Contents of the invention [0004] In order to overcome the...

Claims

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Application Information

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IPC IPC(8): C23C14/24
CPCC23C14/24
Inventor 王俊锋王锋袁明
Owner GUANGDONG UCAN ROBOT TECH CO LTD
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