Target feeding mechanism of coating machine
A technology of feeding mechanism and coating machine, applied in coating, metal material coating process, ion implantation coating and other directions, can solve the problems of poor tool coating, hidden safety hazards of explosion, unreasonable structural design, etc. Coating yield, avoid burst effect
- Summary
- Abstract
- Description
- Claims
- Application Information
AI Technical Summary
Problems solved by technology
Method used
Image
Examples
Example Embodiment
[0029] In order to facilitate the understanding of those skilled in the art, the present invention will be further described below in conjunction with the embodiments and the drawings, and the content mentioned in the embodiments does not limit the present invention.
[0030] See Figure 1 to Figure 5 As shown, a target feeding mechanism of a coating machine of the present invention includes a chassis 1, a first feeding unit 2 detachably connected to the chassis 1, the chassis 1 is surrounded by a plurality of metal plates, and the chassis 1 Roughly in the shape of a hollow cuboid, the case 1 is provided with an accommodating cavity 111, and the first supply unit 2 is used to evaporate the first target 211 from the outside into target ions into the case 1.
[0031] The first feeding unit 2 includes a first carrier 3 that is detachably connected to the cabinet 1 and is used to carry a first target 211, and a first heating unit that is arranged on the first carrier 3 and is used to h...
PUM
Abstract
Description
Claims
Application Information
- R&D Engineer
- R&D Manager
- IP Professional
- Industry Leading Data Capabilities
- Powerful AI technology
- Patent DNA Extraction
Browse by: Latest US Patents, China's latest patents, Technical Efficacy Thesaurus, Application Domain, Technology Topic.
© 2024 PatSnap. All rights reserved.Legal|Privacy policy|Modern Slavery Act Transparency Statement|Sitemap