Displacement measuring device and method based on electromagnetic induction transparent atomic grating

Abstract

The invention belongs to the technical field of precision displacement measurement, and provides a displacement measurement system based on an electromagnetic induction transparent atomic grating, which comprises a coupling laser source, a detection laser source, an offset frequency locking optical path, an electromagnetic induction frequency locking optical path, a reference interference opticalpath, a measurement interference optical path and a photoelectric detection optical path, a corresponding standing wave field structure is built through an interference light path, the refractive index in an atomic medium is periodically modified under an electromagnetic induction transparent mechanism, the atomic grating with the adjustable grating distance is built, detection is carried out through four double-channel photoelectric detectors, displacement measurement is carried out through the atomic grating, and the measurement precision is improved. Moreover, the limitation that the grating distance of the solid grating cannot be adjusted is broken through, the grating distance can be reasonably set according to different displacement degrees of the to-be-measured object, and the grating displacement measurement system with the adjustable minimum displacement resolution is achieved, so that the grating displacement measurement system meets the displacement measurement requirementsin various environments.

Description

technical field [0001] The invention belongs to the technical field of precision displacement measurement, and in particular relates to a displacement measurement device and method based on an electromagnetically induced transparent atomic grating. Background technique [0002] The grating displacement measurement technology first used the Moiré fringe phenomenon formed by the grating overlap to realize the precise measurement of displacement, but the grating based on this measurement principle is only suitable for occasions that do not require high precision. Later, with the development of grating displacement measurement technology based on the principle of interferometry, the accuracy of grating displacement measurement has been improved to the nanometer level, and it has been applied in cutting-edge equipment such as lithography machines. However, the traditional grating displacement measurement technology is mainly based on the physical grating. The grating manufacturin...

AI Technical Summary

Problems solved by technology

First of all, there are inevitably defects in the traditional grating production, which will lead to measurement errors; moreover, there is a singleness in the use of physical gratings, a single-made grating can only be used in one application scenario, and changes in measurement requirements can only be made through replacement, which will increase the cost and the complexity of the repeated adjustment system

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