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Piezoelectric MEMS actuator for compensating unwanted movements and manufacturing process thereof

A technology of actuators, elastic elements, applied in the manufacture/assembly of piezoelectric/electrostrictive devices, processes for producing decorative surface effects, piezoelectric/electrostrictive/magnetostrictive devices, etc.

Active Publication Date: 2020-11-24
STMICROELECTRONICS SRL
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0041] However, optical devices of the type shown in Figure 3 have some disadvantages

Method used

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  • Piezoelectric MEMS actuator for compensating unwanted movements and manufacturing process thereof
  • Piezoelectric MEMS actuator for compensating unwanted movements and manufacturing process thereof
  • Piezoelectric MEMS actuator for compensating unwanted movements and manufacturing process thereof

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Embodiment Construction

[0058] Figure 4 to Figure 6 A piezoelectric MEMS actuator 100 is schematically shown. In particular, the MEMS actuator 100 is configured to integrate optics, eg for autofocus, and to allow compensation of undesired movements.

[0059] The MEMS actuator 100 is formed from a monolithic body of semiconductor material (e.g., polysilicon) 101 having a generally parallel hexahedral shape with a first larger surface 100A and a second larger surface 100B and a reduced thickness ( in a direction parallel to the Cartesian Z axis in the Cartesian reference frame XYZ). exist Figure 4 to Figure 6 In an embodiment of the MEMS actuator 100 has a square shape (in top view) with a side length of eg 7 mm x 7 mm and a depth (in the Z direction) of eg 710 μm.

[0060] The main body 101 of the MEMS actuator 100 includes: a support portion 102, which is viewed from above ( Figure 4 ) has a quadrilateral shape (for example, a square); the first frame 104, which surrounds the support part 102,...

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Abstract

The invention relates to a piezoelectric MEMS actuator for compensating unwanted movements and a manufacturing process thereof. A MEMS actuator includes a monolithic body of semiconductor material, with a supporting portion of semiconductor material, orientable with respect to a first and second rotation axes, transverse to each other. A first frame of semiconductor material is coupled to the supporting portion through first deformable elements configured to control a rotation of the supporting portion about the first rotation axis. A second frame of semiconductor material is coupled to the first frame by second deformable elements, which are coupled between the first and the second frames and configured to control a rotation of the supporting portion about the second rotation axis. The first and second deformable elements carry respective piezoelectric actuation elements.

Description

[0001] Cross References to Related Applications [0002] This application claims the benefit of priority from Italian Patent Application 102019000007219 filed May 24, 2019, the contents of which are hereby incorporated by reference in their entirety to the fullest extent permitted by law. technical field [0003] The present disclosure relates to a microelectromechanical system (MEMS) piezoelectric actuator for compensating for undesired motion and a process for its manufacture. In particular, reference is made hereinafter to a piezoelectric MEMS actuator configured to perform optical image stabilization (OIS) in an optical device such as, for example, a digital still camera (DSC), in particular For autofocus applications, but the disclosure is not limited thereto. Background technique [0004] As we all know, an actuator is a device that converts one type of physical quantity into another different type of physical quantity. In particular, transforming generated quantiti...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G02B26/08B81C1/00B81B7/02H10N30/20H10N30/01
CPCG02B26/0858B81B7/02B81C1/0015B81B2201/047B81C2201/0163B81B3/0021G02B7/023G02B27/646G02B26/0875B81B2201/032B81B2203/058B81B2203/053H10N30/2044H10N30/01G03B5/06G03B2205/0023H02N2/028H02N2/22
Inventor D·朱斯蒂D·帕希
Owner STMICROELECTRONICS SRL
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