PVD vacuum coating machine and electroplating cleaning process
A technology of vacuum coating machine and casing, which is applied in vacuum evaporation coating, metal material coating process, sputtering coating, etc., and can solve the problems of unstable adhesion, coating defects of coated components, easy falling off, etc.
Active Publication Date: 2020-12-01
NINGBO ZHONGJUN SHANGYUAN AUTO PARTS
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Problems solved by technology
However, the adhesion of these deposits on the side wall is not stable, and it is easy to fall off to the plated component during the component coating process, causing the coating defect of the plated component
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[0022] The technical solutions of the various embodiments of the present invention will be clearly and completely described below in conjunction with the accompanying drawings. Apparently, the described embodiments are only some of the embodiments of the present invention, not all of them. Based on the embodiments described in the present invention, all other embodiments obtained by persons of ordinary skill in the art without creative work are within the protection scope of the present invention.
[0023] Such as Figure 1 to Figure 3 As shown, a PVD vacuum coating machine includes a casing, a working chamber 1 and a mechanical part 2 located above are arranged in the casing, and a lifting plate is horizontally arranged in the mechanical part 2, and the lifting plate The bottom end is provided with an insulation cover wall 3, the top of the lifting plate is connected with a push rod, and the top of the push rod is provided with a cylinder, and the cylinder drives the push rod...
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The invention discloses a PVD vacuum coating machine which comprises a machine shell. A working bin and a mechanical part located above the working bin are arranged in the machine shell, a lifting plate is transversely arranged in the mechanical part, an isolation cover wall is arranged at the bottom end of the lifting plate, a separation ring is arranged on the side wall of the machine shell, anda gap is formed between a top plate and the separation ring and used for allowing the isolation cover wall to pass through; a plurality of through holes are uniformly distributed in the separation ring; a plurality of motors are fixedly arranged on the side walls of the mechanical part, gears are arranged at the output ends of the motors, the gears are in engaged connection with vertical racks, and the racks are fixedly arranged on moving rails; movable moving cleaning parts are arranged on the moving rails; and a plurality of air spraying openings are formed in the outer side walls of the isolation cover wall, the air spraying openings spray hot air towards the side walls of the working bin, and the moving cleaning parts spray cleaning liquid towards the side walls of the working bin. The side walls of the vacuum coating machine can be automatically cleaned, the coating work is not influenced, the coating quality can be guaranteed, and the efficiency is improved.
Description
technical field [0001] The invention relates to a PVD vacuum coating machine and an electroplating cleaning process. Background technique [0002] PVD is Physical Vapor Deposition, which is an advanced surface treatment technology widely used in the world. Its working principle is to use gas discharge to separate the gas or evaporated substance under vacuum conditions, and deposit the evaporated substance or its reactant on the substrate while the gas ions or evaporated substance ions are bombarded. It has the characteristics of fast deposition speed and clean surface, and especially has the advantages of strong film adhesion, good winding, and a wide range of materials that can be plated. Vacuum coating machine mainly refers to a type of coating that needs to be carried out under a relatively high degree of vacuum. Its working principles include vacuum ion evaporation, magnetron sputtering, MBE molecular beam epitaxy, PLD laser sputtering deposition, etc. The main idea is...
Claims
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IPC IPC(8): C23C14/22B08B3/02B08B3/08
CPCC23C14/22B08B3/02B08B3/08
Inventor 刘洪涛夏林智理
Owner NINGBO ZHONGJUN SHANGYUAN AUTO PARTS