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A liquid phase micro-nano processing method and equipment

A micro-nano processing and nano-processing technology, applied in micro-structure technology, micro-structure devices, manufacturing micro-structure devices, etc., can solve the problem of long research and development cycle of the whole equipment, and the processing accuracy is greatly affected by the performance of the photoresist at ambient temperature, etc. problems, to achieve the effect of improving nano-processing accuracy, large electric field range, and wide material range

Active Publication Date: 2021-08-10
CHONGQING INST OF GREEN & INTELLIGENT TECH CHINESE ACADEMY OF SCI
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  • Application Information

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Problems solved by technology

However, both of these are capital-intensive micro-nano processing methods, and their processing accuracy is greatly affected by ambient temperature, photoresist performance, etc., and the development cycle of the complete machine equipment is relatively long

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  • A liquid phase micro-nano processing method and equipment
  • A liquid phase micro-nano processing method and equipment
  • A liquid phase micro-nano processing method and equipment

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Embodiment Construction

[0032] The technical solutions in the patent embodiments of the present invention will be clearly and completely described below in conjunction with the accompanying drawings in the patent embodiments of the present invention. Obviously, the described embodiments are only a part of the patent embodiments of the present invention, not all of them. Example. Based on the embodiments in the patent of the present invention, all other embodiments obtained by persons of ordinary skill in the art without making creative efforts belong to the protection scope of the patent of the present invention.

[0033] The liquid-phase micro-nano processing method and equipment of the present invention belong to a new type of micro-nano processing method, which realizes micro-nano processing in a liquid-phase environment. The present invention is based on the micro-nano processing equipment of nano glass microtubes, combined with the liquid phase nano-processing method , can realize nano-film patt...

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Abstract

The invention provides a liquid-phase micro-nano processing method and equipment. The device combines the liquid-phase nano-processing method to realize patterned processing of nano-films, solid nanopore processing and nano 3D printing, which uses a quartz tuning fork to control the nano-glass microtubes to directly contact the nano-film for processing, and processes the nano-film by setting a bias voltage or current. The liquid-phase micro-nano processing method and equipment of the present invention can realize multiple tasks such as nano-pattern processing, nano-hole or nano-hole array processing, and 3D nano-printing on the same platform, which not only realizes subtractive manufacturing, but also realizes additive manufacturing. Greatly improve the complexity of processing, especially the complexity of nanoscale processing.

Description

technical field [0001] The invention belongs to the technical field of micro-nano processing, and relates to a liquid-phase micro-nano processing method and equipment, which can prepare various shapes and patterns on various types of film substrates. Background technique [0002] Since the development of integrated circuit technology, micro-nano processing technology has been the core technology that major companies in various countries have strived to break through and improve, and it is also the core competitiveness of science and technology among countries. Lithography equipment is the core equipment in the field of micro-nano processing, which directly determines the ability to produce devices, which in turn affects the long-term development of a country's comprehensive national strength. At present, there are two main forms of photolithography, including microlithography and micro-nanofabrication, or photomask manufacturing and electron beam lithography. [0003] The u...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G05B19/04B81C1/00
CPCB81C1/00015G05B19/04
Inventor 方绍熙王德强何石轩殷博华谢婉谊曾德琳罗志勇周大明王赟姣唐鹏石彪梁丽媛尹雅洁周硕
Owner CHONGQING INST OF GREEN & INTELLIGENT TECH CHINESE ACADEMY OF SCI
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