Liquid-phase micro-nano processing method and equipment
A micro-nano processing and liquid phase technology, which is applied in the direction of microstructure technology, microstructure devices, manufacturing microstructure devices, etc., can solve the problem of long R&D cycle of complete machine equipment, processing accuracy is greatly affected by the performance of photoresist at ambient temperature, etc. problems, to achieve the effect of improving nano-processing precision, large electric field range, and wide range of materials
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[0032] The technical solutions in the patent embodiments of the present invention will be clearly and completely described below in conjunction with the accompanying drawings in the patent embodiments of the present invention. Obviously, the described embodiments are only a part of the patent embodiments of the present invention, not all of them. Example. Based on the embodiments in the patent of the present invention, all other embodiments obtained by persons of ordinary skill in the art without making creative efforts belong to the protection scope of the patent of the present invention.
[0033] The liquid-phase micro-nano processing method and equipment of the present invention belong to a new type of micro-nano processing method, which realizes micro-nano processing in a liquid-phase environment. The present invention is based on the micro-nano processing equipment of nano glass microtubes, combined with the liquid phase nano-processing method , can realize nano-film patt...
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