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Deformation measurement system, deformation measurement method and measurement head

A measurement system and deformation technology, which can be used in measurement devices, instruments, optics, etc.

Active Publication Date: 2020-12-15
TSINGHUA UNIV +1
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0003] However, when the traditional laser interferometer performs high-precision measurement, due to the influence of phase ambiguity, it cannot realize continuous light interruption. It can only achieve long-distance observation by incremental measurement to achieve continuous phase accumulation.

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  • Deformation measurement system, deformation measurement method and measurement head
  • Deformation measurement system, deformation measurement method and measurement head
  • Deformation measurement system, deformation measurement method and measurement head

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Embodiment Construction

[0053] In the following, only some exemplary embodiments are briefly described. As those skilled in the art would realize, the described embodiments may be modified in various different ways, all without departing from the spirit or scope of the present invention. Accordingly, the drawings and descriptions are to be regarded as illustrative in nature and not restrictive.

[0054]In describing the present invention, it is to be understood that the terms "center", "longitudinal", "transverse", "length", "width", "thickness", "upper", "lower", "front", " Back", "Left", "Right", "Vertical", "Horizontal", "Top", "Bottom", "Inner", "Outer", "Clockwise", "Counterclockwise", etc. or The positional relationship is based on the orientation or positional relationship shown in the drawings, which is only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the referred device or element must have a specific orien...

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Abstract

The invention provides a deformation measurement system, which comprises a double-optical-comb light source, a distance measurement module, a measurement light path fixing part and a photoelectric detector, wherein the double-optical-comb light source comprises two optical frequency combs with small repetition frequency difference, a first optical frequency comb emits signal light for distance measurement, and a second optical frequency comb emits local oscillation light for sampling; the distance measurement module receives light beams emitted by the double-optical-comb light source, outputsthe signal light to the measurement light path fixing part, receives echoes reflected by the signal light from the measurement light path fixing part, couples the local oscillation light with the reflection echoes and performs outputting to the photoelectric detector; the measurement light path fixing part is fixed on a to-be-measured target, and the signal light is divided into two paths to measure the optical path difference between a measuring arm and a reference arm; and the photoelectric detector is configured to receive the coupling light output by the distance measurement module.

Description

technical field [0001] The present invention generally relates to the technical field of optical precision metrology, and in particular to a deformation measurement system using a double optical comb light source, a method for measuring deformation and a structure of a measuring head. Background technique [0002] In the field of aerospace and high-end manufacturing, many large parts need to be tested for stability, that is, to measure the deformation of parts after experiencing special environmental conditions to evaluate the stability of parts. These deformation measurements require repeatable and high-precision measurement equipment, such as the stability test of the secondary mirror assembly and front lens barrel assembly of space cameras in the aerospace field, which needs to achieve sub-micron precision measurement. [0003] However, when the traditional laser interferometer performs high-precision measurement, due to the influence of phase ambiguity, it cannot realize...

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Application Information

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IPC IPC(8): G01B11/16G01B9/02G02B27/10G02B27/30
CPCG01B11/161G01B11/18G01B9/02015G01B9/02028G02B27/10G02B27/30
Inventor 吴冠豪周镭陈芳张瑞雪周思宇
Owner TSINGHUA UNIV