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Method for fabricating a component of an abatement apparatus

A component and partial technology, applied in the direction of combustion method, burner manufacturing, general control system, etc., can solve problems such as manufacturing and eliminating devices

Pending Publication Date: 2020-12-15
EDWARDS LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0004] Although abatement is helpful in dealing with effluent streams, manufacturing abatement can be problematic

Method used

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  • Method for fabricating a component of an abatement apparatus
  • Method for fabricating a component of an abatement apparatus

Examples

Experimental program
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Effect test

Embodiment Construction

[0059] Before discussing the embodiments in more detail, an overview will first be provided. Embodiments provide a technique for reliably producing components of an abatement apparatus having predetermined operating characteristics. A 3D model of the part is generated and properties of the part are defined (such as the properties of fluids flowing into, out of and / or through the part, the structure of the part, thermal, chemical and / or physical requirements, etc.). These properties are used when meshing the 3D model to provide a finite element representation of the part incorporating these properties. In other words, when generating a finite element representation of a part, properties of the part can be specified in order to affect how well each finite element is filled and what is filled. For example, the porosity of the surface of a region of a component can be controlled by controlling the number of filled faces of the finite elements making up the surface and / or by varyi...

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Abstract

A method for fabricating a component of an abatement apparatus is disclosed. The method comprises: meshing a 3D model representation of a component defining a reaction chamber of an abatement apparatus based on specified component characteristics to define an optimised finite element representation of the component; and fabricating the optimised finite element representation. In this way, a 3D model of a component of an abatement apparatus can be generated from which its performance can be modelled. Particular characteristics of the component may be defined which affect the operation of the abatement apparatus. Those characteristics may then be used to generate the optimized finite element representation of the component which has those characteristics using meshing (it will be appreciatedthat meshing is the operation of representing a geometric object as a set of finite elements). The optimized finite element representation may then fabricated, reliably producing a component having the required characteristics.

Description

technical field [0001] The invention relates to a method for manufacturing a part of an elimination device. Background technique [0002] Abatement devices for performing abatement are known and are commonly used to treat exhaust gas streams from manufacturing process tools used, for example, in the semiconductor or flat panel display manufacturing industries. During such manufacturing, residual perfluorinated compounds (PFCs) and other compounds are present in the exhaust gas stream pumped from the process tool. PFCs are difficult to remove from exhaust gases, and their release into the environment is undesirable since they are known to have relatively high greenhouse activity. [0003] Known abatement devices use heat to remove PFCs and other compounds from the exhaust gas stream. Typically, the exhaust gas stream is a nitrogen stream containing PFCs and other compounds. Induction heaters, plasma or combustion are used to generate heat to treat the effluent stream. For...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): F23G7/06F23D14/18G06T17/20
CPCF23D14/18F23G7/06G06T17/20F23D2203/105F23D2203/107F23D2212/201F23D2213/00F23G2209/14B33Y10/00B33Y50/00G06T2210/24G05B19/4099G06F30/23F23G2209/142G05B2219/35017G06F2113/10G06F2119/18F23G7/061G06F30/00
Inventor A·J·斯利G·P·奈特D·M·普萊斯M·维尔马
Owner EDWARDS LTD