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PDMS-based elastic base material, manufacturing method thereof and electronic device

A technology of elastic substrate and manufacturing method, which is applied in chemical instruments and methods, laboratory utensils, ion implantation and plating, etc. Cracked, good quality effect

Inactive Publication Date: 2021-01-05
UNIV OF SCI & TECH OF CHINA
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

However, when the metal thin film is prepared on the PDMS substrate in the prior art, the prepared metal thin film will have problems such as wrinkling or cracking.

Method used

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  • PDMS-based elastic base material, manufacturing method thereof and electronic device
  • PDMS-based elastic base material, manufacturing method thereof and electronic device
  • PDMS-based elastic base material, manufacturing method thereof and electronic device

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Embodiment Construction

[0036] The following will clearly and completely describe the technical solutions in the embodiments of the present invention with reference to the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only some, not all, embodiments of the present invention. Based on the embodiments of the present invention, all other embodiments obtained by persons of ordinary skill in the art without making creative efforts belong to the protection scope of the present invention.

[0037] As described in the background technology, PDMS (polydimethylsiloxane) is a material of a high-molecular organosilicon compound, which is a non-toxic, hydrophobic, viscoelastic transparent body. Its manufacturing process is simple and fast, and it has a high Biocompatibility, is widely used in the field of microfluidics. By preparing or transferring metal electrodes on PDMS substrates, the application of PDMS-based substrates in flexible electronics or ...

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Abstract

The invention provides a PDMS-based elastic base material, a manufacturing method thereof and an electronic device. According to the technical scheme, a transition layer is introduced between a PDMS substrate and a metal film, and the thermal expansion coefficient of the transition layer is between the thermal expansion coefficient of the PDMS substrate and the thermal expansion coefficient of themetal film, so that the problem of larger stress generated due to larger difference in the thermal expansion coefficient between the PDMS substrate and the metal film can be solved, the problems of wrinkling or cracking and the like when the metal film is manufactured on one side, deviating from the PDMS substrate, of the transition layer are solved, and the excellent quality of the metal film inthe PDMS-based elastic base material is ensured; and meanwhile, an adhesion layer is formed before the metal thin film is manufactured, so that the adhesion of the metal thin film can be further improved, and the performance of the metal thin film based on the PDMS elastic base material is improved.

Description

technical field [0001] The invention relates to the technical field of electronic devices, and more specifically, relates to a PDMS-based elastic substrate, a manufacturing method thereof, and an electronic device. Background technique [0002] PDMS (Polydimethylsiloxane) is a polymer organosilicon compound material. It is a non-toxic, hydrophobic, viscoelastic transparent body. Its manufacturing process is simple and fast, and it has high biocompatibility. Widely used in the field of microfluidics. By preparing or transferring metal electrodes on PDMS substrates, the application of PDMS-based substrates in flexible electronics or wearable devices is also increasing. However, when the metal thin film is prepared on the PDMS substrate in the prior art, problems such as wrinkling or cracking may occur in the prepared metal thin film. Contents of the invention [0003] In view of this, the present invention provides a PDMS-based elastic substrate and its manufacturing metho...

Claims

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Application Information

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IPC IPC(8): C23C14/20C23C14/08C23C14/35B29C69/02B01L3/00
CPCB01L3/502707B29C69/02C23C14/086C23C14/205C23C14/35
Inventor 周成刚魏珊珊魏钰何逸昭
Owner UNIV OF SCI & TECH OF CHINA